Characteristics of Ultralow Aspect Ratio Toroidal Plasmas and Non-Solenoidal Startup and Edge Stability Studies at Near-Unity Aspect Ratio (Final Report)
AbstractIn order to deposit conformal films in the high aspect ratio trench and via structures in future high-density phase-change memory devices, suitable ALD/CVD precursors are needed. We report on the development of novel germanium(II) metal-organic ALD/CVD precursors containing amide, cyclopentadienyl, and amidinate ligands. The physical properties, volatility, and thermal behavior of the precursors were evaluated by simultaneous thermal analysis (STA) and vapor pressure measurements. Stability studies were conducted to investigate the suitability of the precursors for use as ALD/CVD precursors for device manufacturing.
A set of reduced MHD equations is derived using the equation of state including plasma compressibility. By applying assumption of pressure, i.e., R2P = const. , a set of reduced magnetohydrodynamic equations for toroidal plasmas are obtained for large aspect ratio, high β tokamaks. These equations include all terms of the same order as the toroidal effect and only involve three variables, namely the flux, stream function and pressure.