Improvements of Patterning Characteristics of Scan-Projection Lithography Using Gradient-Index Lens Array

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.81.661 ◽

2015 ◽

Vol 81 (7) ◽

pp. 661-667

Author(s):

Toshiyuki HORIUCHI ◽

Naoki TAKADA ◽

Hiroshi KOBAYASHI

Keyword(s):

Gradient Index ◽

Projection Lithography ◽

Gradient Index Lens

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Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates

Japanese Journal of Applied Physics ◽

10.7567/1347-4065/ab0543 ◽

2019 ◽

Vol 58 (SD) ◽

pp. SDDA01

Author(s):

Toshiyuki Horiuchi ◽

Yuta Kazama ◽

Hiroya Yoshida ◽

Akira Yanagida ◽

Hiroshi Kobayashi

Keyword(s):

Stainless Steel ◽

Wet Etching ◽

Steel Plates ◽

Gradient Index ◽

Hydrophobic Properties ◽

Projection Lithography ◽

Gradient Index Lens

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Directional Difference of Patterns Printed by Scan-Projection Lithography Using a Gradient Index Lens Array

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.06gl17 ◽

2013 ◽

Vol 52 (6S) ◽

pp. 06GL17 ◽

Author(s):

Toshiyuki Horiuchi ◽

Takeru Suzuki ◽

Hiroshi Kobayashi

Keyword(s):

Gradient Index ◽

Projection Lithography ◽

Gradient Index Lens ◽

Directional Difference

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Gradient-index lens array for forming three-dimensional spatial images

10.1117/12.454915 ◽

2002 ◽

Author(s):

Fumio Okano ◽

Jun Arai ◽

Makoto Okui

Keyword(s):

Three Dimensional ◽

Gradient Index ◽

Gradient Index Lens

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Optical shifter for a three-dimensional image by use of a gradient-index lens array

Applied Optics ◽

10.1364/ao.41.004140 ◽

2002 ◽

Vol 41 (20) ◽

pp. 4140 ◽

Author(s):

Fumio Okano ◽

Jun Arai

Keyword(s):

Three Dimensional ◽

Gradient Index ◽

Dimensional Image ◽

Gradient Index Lens

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Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array

Journal of Photopolymer Science and Technology ◽

10.2494/photopolymer.30.49 ◽

2017 ◽

Vol 30 (1) ◽

pp. 49-55 ◽

Author(s):

Toshiyuki Horiuchi ◽

Takanori Sato ◽

Hiroshi Kobayashi

Keyword(s):

Gradient Index ◽

Exposure System ◽

Gradient Index Lens

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Reduction/enlargement gradient-index lens array

Applied Optics ◽

10.1364/ao.23.001715 ◽

1984 ◽

Vol 23 (11) ◽

pp. 1715 ◽

Author(s):

James D. Rees ◽

William Lama

Keyword(s):

Gradient Index ◽

Gradient Index Lens

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A Novel Projection Exposure System Using a Gradient-Index Lens Array

2007 Digest of papers Microprocesses and Nanotechnology ◽

10.1109/imnc.2007.4456258 ◽

2007 ◽

Author(s):

Hiroshi Kobayashi ◽

Toshiyuki Horiuchi

Keyword(s):

Gradient Index ◽

Exposure System ◽

Gradient Index Lens

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Luminous intensity of a gradient-index lens array

Applied Optics ◽

10.1364/ao.21.001013 ◽

1982 ◽

Vol 21 (6) ◽

pp. 1013 ◽

Author(s):

Minoru Toyama ◽

Manabu Takami

Keyword(s):

Luminous Intensity ◽

Gradient Index ◽

Gradient Index Lens

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Laser microsoldering of tape‐automated bonding leads using an Nd:YAG laser end‐pumped by a laser diode bar with gradient index lens array coupling

Optical Engineering ◽

10.1117/1.601084 ◽

1996 ◽

Vol 35 (12) ◽

pp. 3585 ◽

Author(s):

Satoshi Yamaguchi

Keyword(s):

Laser Diode ◽

Nd:Yag Laser ◽

Gradient Index ◽

Gradient Index Lens

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Resolution analysis of a gradient-index rod and a gradient-index lens array

Applied Optics ◽

10.1364/ao.47.006190 ◽

2008 ◽

Vol 47 (33) ◽

pp. 6190 ◽

Author(s):

Xi Chen ◽

Nicholas George

Keyword(s):

Gradient Index ◽

Resolution Analysis ◽

Gradient Index Lens

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