Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array
2017 ◽
Vol 30
(1)
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pp. 49-55
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Toshiyuki Horiuchi
◽
Takanori Sato
◽
Hiroshi Kobayashi
Hiroshi Kobayashi
◽
Toshiyuki Horiuchi
2008 ◽
Vol 47
(7)
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pp. 5702-5707
◽
Hiroshi Kobayashi
◽
Toshiyuki Horiuchi
Fumio Okano
◽
Jun Arai
◽
Makoto Okui
2002 ◽
Vol 41
(20)
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pp. 4140
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1984 ◽
Vol 23
(11)
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pp. 1715
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James D. Rees
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William Lama
1982 ◽
Vol 21
(6)
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pp. 1013
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Minoru Toyama
◽
Manabu Takami
1996 ◽
Vol 35
(12)
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pp. 3585
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2008 ◽
Vol 47
(33)
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pp. 6190
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Xi Chen
◽
Nicholas George
2015 ◽
Vol 81
(7)
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pp. 661-667
Toshiyuki HORIUCHI
◽
Naoki TAKADA
◽
Hiroshi KOBAYASHI
1990 ◽
Vol 29
(28)
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pp. 4071
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Tetsuo Kyogoku
◽
Toshikazu Suzuki
◽
Masayuki Mino