scholarly journals Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array

2017 ◽  
Vol 30 (1) ◽  
pp. 49-55 ◽  
Author(s):  
Toshiyuki Horiuchi ◽  
Takanori Sato ◽  
Hiroshi Kobayashi
2008 ◽  
Vol 47 (7) ◽  
pp. 5702-5707 ◽  
Author(s):  
Hiroshi Kobayashi ◽  
Toshiyuki Horiuchi

1984 ◽  
Vol 23 (11) ◽  
pp. 1715 ◽  
Author(s):  
James D. Rees ◽  
William Lama

1982 ◽  
Vol 21 (6) ◽  
pp. 1013 ◽  
Author(s):  
Minoru Toyama ◽  
Manabu Takami

1990 ◽  
Vol 29 (28) ◽  
pp. 4071 ◽  
Author(s):  
Tetsuo Kyogoku ◽  
Toshikazu Suzuki ◽  
Masayuki Mino

Sign in / Sign up

Export Citation Format

Share Document