Research on error analysis and compensation method for deformation measurement of flexible wheel of harmonic drive

2021 ◽  
Vol 29 (4) ◽  
pp. 793-801
Author(s):  
Cong-bin YANG ◽  
◽  
Qing-xu GUO ◽  
Zhi-feng LIU ◽  
Tao ZHANG ◽  
...  
Keyword(s):  
Error Analysis ◽  
Compensation Method ◽  
Deformation Measurement ◽  
Harmonic Drive

Error analysis of deformation measurement of active lap

2013 ◽  
Vol 25 (2) ◽  
pp. 325-329 ◽  
Author(s):  
赵洪深 Zhao Hongshen ◽  
李晓今 Li Xiaojin ◽  
曾志革 Zeng Zhige
Keyword(s):  
Error Analysis ◽  
Deformation Measurement

Error analysis and compensation method of focus detection in exposure apparatus

2008 ◽  
Vol 26 (1) ◽  
pp. 10
Author(s):  
Yasuhiro Hidaka ◽  
Kiyoshi Uchikawa ◽  
Daniel G. Smith
Keyword(s):  
Error Analysis ◽  
Compensation Method ◽  
Focus Detection

Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication

2015 ◽  
Vol 35 (s1) ◽  
pp. s105001
Author(s):  
董宁宁 Dong Ningning ◽  
崔锦江 Cui Jinjiang ◽  
徐建根 Xu Jiangen ◽  
许杰 Xu Jie
Keyword(s):  
Error Analysis ◽  
Compensation Method ◽  
Holographic Grating ◽  
Positioning Error ◽  
Grating Fabrication

Error analysis for noise reduction in 3D deformation measurement with digital color holography

2017 ◽  
Vol 34 (5) ◽  
pp. B9 ◽  
Author(s):  
Silvio Montrésor ◽  
Pascal Picart ◽  
Oleksandr Sakharuk ◽  
Leonid Muravsky
Keyword(s):  
Error Analysis ◽  
Noise Reduction ◽  
Deformation Measurement ◽  
Color Holography ◽  
3D Deformation
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