Impact of Laser on Coupled Extreme Ultraviolet Source from Three Plasmas in Capillary Discharge

Chinese Journal of Lasers ◽

10.3788/cjl201542.0602009 ◽

2015 ◽

Vol 42 (6) ◽

pp. 0602009

Author(s):

张兴强 Zhang Xingqiang ◽

靳龙 Jin Long

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge

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Effect of a strong axial magnetic field in the plasma recombination and extreme ultraviolet emission from a highly-ionized capillary discharge

IEEE Journal of Quantum Electronics ◽

10.1109/3.60905 ◽

1990 ◽

Vol 26 (10) ◽

pp. 1809-1814 ◽

Author(s):

M.C. Marconi ◽

J.J. Rocca ◽

J.F. Schmerge ◽

M. Villagram ◽

F.J. Lehmann

Keyword(s):

Magnetic Field ◽

Extreme Ultraviolet ◽

Axial Magnetic Field ◽

Capillary Discharge ◽

Ultraviolet Emission

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Influence of current prepulse on capillary-discharge extreme-ultraviolet laser

Physical Review A ◽

10.1103/physreva.75.043808 ◽

2007 ◽

Vol 75 (4) ◽

Author(s):

C. A. Tan ◽

K. H. Kwek

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Laser

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Time-resolved study of the extreme-ultraviolet emission and plasma dynamics of a sub-Joule, fast capillary discharge

Physics of Plasmas ◽

10.1063/1.4927775 ◽

2015 ◽

Vol 22 (8) ◽

pp. 083501 ◽

Author(s):

J. C. Valenzuela ◽

E. S. Wyndham ◽

M. Favre

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Emission ◽

Plasma Dynamics ◽

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Time‐resolved extreme ultraviolet emission from a highly ionized lithium capillary discharge

Applied Physics Letters ◽

10.1063/1.101158 ◽

1989 ◽

Vol 54 (22) ◽

pp. 2180-2182 ◽

Author(s):

Mario C. Marconi ◽

Jorge J. Rocca

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Emission ◽

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Observations and analysis of extreme ultraviolet emission by capillary discharge with Xe as target

2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser TechnologyOptoelectronics Technology (ASOT) ◽

10.1109/rcslplt.2010.5615265 ◽

2010 ◽

Author(s):

Xu Qiang ◽

Zhao Yong-peng ◽

Guan Zhi-liang ◽

Zhang Ye ◽

Wang Qi ◽

...

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Emission

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Observations and analysis of extreme ultraviolet emission between 10nm and 70nm by capillary discharge with Xe as target

2011 Academic International Symposium on Optoelectronics and Microelectronics Technology ◽

10.1109/aismot.2011.6159343 ◽

2011 ◽

Author(s):

Zhao Yong-peng ◽

Xu Qiang ◽

Liu Yang ◽

Wen Gang ◽

Wang Qi ◽

...

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Emission

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Development of Xe-filled capillary discharge extreme-ultraviolet radiation source for semiconductor lithography

10.1117/12.483704 ◽

2003 ◽

Author(s):

Yusuke Teramoto ◽

Hiroto Sato ◽

Kazunori Bessho ◽

Koji Miyauchi ◽

Mitsuru Ikeuchi ◽

...

Keyword(s):

Ultraviolet Radiation ◽

Radiation Source ◽

Extreme Ultraviolet ◽

Capillary Discharge ◽

Extreme Ultraviolet Radiation

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High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 135 nm

Applied Optics ◽

10.1364/ao.39.003678 ◽

2000 ◽

Vol 39 (21) ◽

pp. 3678 ◽

Author(s):

Marc A. Klosner ◽

William T. Silfvast

Keyword(s):

High Temperature ◽

Extreme Ultraviolet ◽

Metal Vapor ◽

Capillary Discharge ◽

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Saturated laser of Ne-like argon and Xe-based extreme ultraviolet source radiated from capillary discharge plasma

2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser TechnologyOptoelectronics Technology (ASOT) ◽

10.1109/rcslplt.2010.5615423 ◽

2010 ◽

Author(s):

Yongpeng Zhao ◽

Qi Wang ◽

Yao Xie ◽

Xu Qiang ◽

Shan Jiang ◽

...

Keyword(s):

Discharge Plasma ◽

Extreme Ultraviolet ◽

Capillary Discharge

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The effects of the prepulse on capillary discharge extreme ultraviolet laser

Physics of Plasmas ◽

10.1063/1.2159465 ◽

2006 ◽

Vol 13 (1) ◽

pp. 013102 ◽

Author(s):

M. Shuker ◽

A. Ben-kish ◽

R. A. Nemirovsky ◽

A. Fisher ◽

A. Ron

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Laser

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