Development of Xe-filled capillary discharge extreme-ultraviolet radiation source for semiconductor lithography

2003 ◽  
Author(s):  
Yusuke Teramoto ◽  
Hiroto Sato ◽  
Kazunori Bessho ◽  
Koji Miyauchi ◽  
Mitsuru Ikeuchi ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Capillary Discharge ◽  
Extreme Ultraviolet Radiation

An extreme ultraviolet radiation source based on plasma heated by millimeter range radiation

2011 ◽  
Vol 75 (1) ◽  
pp. 64-66 ◽  
Author(s):  
A. V. Vodopyanov ◽  
S. V. Golubev ◽  
D. A. Mansfeld ◽  
N. N. Salashchenko ◽  
N. I. Chkhalo
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation

An extreme ultraviolet radiation source for the simulation of the ionosphere

1991 ◽  
Vol 62 (7) ◽  
pp. 1721-1726 ◽  
Author(s):  
K.‐I. Oyama ◽  
K. Suzuki ◽  
N. Kawashima ◽  
K. S. Zalpuri ◽  
S. Teii ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation

scholarly journals Эмиссионные свойства лазерной плазмы при ее возбуждении на молекулярно-кластерных струях углекислоты

2019 ◽  
Vol 89 (11) ◽  
pp. 1656
Author(s):  
А.Н. Нечай ◽  
А.А. Перекалов ◽  
Н.И. Чхало ◽  
Н.Н. Салащенко
Keyword(s):  
Ultraviolet Radiation ◽  
Laser Plasma ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Supersonic Nozzle ◽  
Plasma Source ◽  
Molecular Cluster ◽  
Gas Jet ◽  
Euv Emission ◽  
Extreme Ultraviolet Radiation

The paper presents the results of studies of a gas-jet laser-plasma source of extreme ultraviolet radiation (EUV) based on a conical supersonic nozzle. Molecular cluster CO2 jets were used as targets. By changing the parameters of the gas at the nozzle entrance, various modes of gas outflow were obtained, the influence of these modes on the emission and technical characteristics of the radiation source was studied. An experimentally shown is an increase in EUV emission with an increase in the amount of clustered matter in the jet. A possible relationship was observed between the increase in the intensity of EUV radiation with an increase in the number of clustered matter in the jet.

Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma

1999 ◽  
Vol 38 (25) ◽  
pp. 5413 ◽  
Author(s):  
Klaus Bergmann ◽  
Guido Schriever ◽  
Oliver Rosier ◽  
Martin Müller ◽  
Willi Neff ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Discharge Plasma ◽  
Extreme Ultraviolet ◽  
Gas Discharge ◽  
Gas Discharge Plasma ◽  
Extreme Ultraviolet Radiation

scholarly journals Cancer cell classification with coherent diffraction imaging using an extreme ultraviolet radiation source

2014 ◽  
Vol 1 (3) ◽  
pp. 031008 ◽  
Author(s):  
Michael Zürch ◽  
Stefan Foertsch ◽  
Mark Matzas ◽  
Katharina Pachmann ◽  
Rainer Kuth ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Cancer Cell ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Cell Classification ◽  
Coherent Diffraction Imaging ◽  
Diffraction Imaging ◽  
Extreme Ultraviolet Radiation
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