Influence of current prepulse on capillary-discharge extreme-ultraviolet laser

2007 ◽  
Vol 75 (4) ◽  
Author(s):  
C. A. Tan ◽  
K. H. Kwek
Keyword(s):  
Extreme Ultraviolet ◽  
Capillary Discharge ◽  
Ultraviolet Laser

scholarly journals The effects of the prepulse on capillary discharge extreme ultraviolet laser

2006 ◽  
Vol 13 (1) ◽  
pp. 013102 ◽  
Author(s):  
M. Shuker ◽  
A. Ben-kish ◽  
R. A. Nemirovsky ◽  
A. Fisher ◽  
A. Ron
Keyword(s):  
Extreme Ultraviolet ◽  
Capillary Discharge ◽  
Ultraviolet Laser

scholarly journals Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

2019 ◽  
Vol 10 (1) ◽  
pp. 214
Author(s):  
Huaiyu Cui ◽  
Yongpeng Zhao ◽  
Muhammad Usman Khan ◽  
Dongdi Zhao ◽  
Zhigang Fan
Keyword(s):  
Thermal Effect ◽  
Laser Irradiation ◽  
Temperature Variation ◽  
Extreme Ultraviolet ◽  
High Energy ◽  
Copper Surface ◽  
Capillary Discharge ◽  
Ultraviolet Laser

Interaction of Extreme Ultraviolet (EUV) laser with matters is an attractive subject since novel phenomena always occur under the effect of high energy photons. In this paper, the thermal effect involved in the interaction of a capillary discharge 46.9 nm laser with copper was studied theoretically and experimentally. The temperature variation of the laser-irradiated region of copper was calculated. According to the results, the copper surface was ablated obviously and presented the trace of melting, evaporation, and resolidification, which suggested the thermal effect occurred on the surface during the laser irradiation.

scholarly journals Nanoimaging with a compact extreme-ultraviolet laser

2005 ◽  
Vol 30 (16) ◽  
pp. 2095 ◽  
Author(s):  
G. Vaschenko ◽  
F. Brizuela ◽  
C. Brewer ◽  
M. Grisham ◽  
H. Mancini ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser

Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography

2008 ◽  
Vol 17 (2) ◽  
pp. 024019 ◽  
Author(s):  
L Ottaviano ◽  
F Bussolotti ◽  
S Piperno ◽  
M Rinaldi ◽  
S Santucci ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Interferometric Lithography ◽  
Laser Interferometric

scholarly journals Extreme-ultraviolet laser metrology of O i transitions

2008 ◽  
Vol 389 (1) ◽  
pp. L4-L7 ◽  
Author(s):  
T. I. Ivanov ◽  
E. J. Salumbides ◽  
M. O. Vieitez ◽  
P. C. Cacciani ◽  
C. A. de Lange ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Laser Metrology

Alignment system for solid-surface extreme-ultraviolet laser targets

1991 ◽  
Vol 30 (30) ◽  
pp. 4337
Author(s):  
Daniel Tauber ◽  
Santanu Basu ◽  
Peter L. Hagelstein
Keyword(s):  
Solid Surface ◽  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Alignment System
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