Compounding Control of Ultra-precision Positioning Stage Based on Inverse Generalized PI Model
2015 ◽
Vol 51
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pp. 198
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2016 ◽
Vol 33
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pp. 579-586
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2011 ◽
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pp. 2647-2654
2009 ◽
Vol 407-408
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2011 ◽
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2017 ◽
Vol 83
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