scholarly journals Dynamic Modeling and Analysis of a 3-DOF Ultra-precision Positioning Stage with Air Bearinga

2011 ◽  
Vol 16 ◽  
pp. 264-270 ◽  
Author(s):  
Cai Tian ◽  
Zhang Ming ◽  
Zhu Yu ◽  
Hu Chuxiong
Keyword(s):  
Dynamic Modeling ◽  
Precision Positioning ◽  
Modeling And Analysis ◽  
Positioning Stage ◽  
Ultra Precision

Modeling and Control of Ultra Precision Positioning System for a Grating Ruling Machine

2011 ◽  
Vol 110-116 ◽  
pp. 2647-2654
Author(s):  
Yuan Shen ◽  
Dong Cai Liu ◽  
Guo Fu Lian ◽  
Jie Guo ◽  
Chan Gan Zhu
Keyword(s):  
Hybrid Control ◽  
System Modeling ◽  
Positioning System ◽  
Precision Positioning ◽  
Positional Accuracy ◽  
Modeling And Control ◽  
Control Scheme ◽  
Positioning Stage ◽  
Ultra Precision ◽  
Long Stroke

This paper presents a system modeling based control scheme of an ultra precision positioning system for a grating ruling machine. Since the positioning system having a long stroke with ultra precision, the positioning system consists of a coarse positioning stage driven by a servo motor and a fine positioning stage driven by a piezoelectric ceramic. In order to improve positional accuracy and remove the noise components of motion, a hybrid control scheme based on the system modeling is implemented. Considering position-dependent and time-dependent behaviors of the stages, a model based LQ controller is utilized to the coarse stage and a PID feedback controller based on neural network is utilized to the fine stage. Experiment results reveal the efficient and robust of the control scheme and show that the positional accuracy has been readily achieved within 8.6 nm.

Development of Novel XY Micropositioning Stage

2009 ◽  
Vol 407-408 ◽  
pp. 103-106 ◽  
Author(s):  
Hua Wei Chen ◽  
De Huai Jiang ◽  
Ichiro Hagiwara
Keyword(s):  
Rapid Development ◽  
Fem Analysis ◽  
Precision Positioning ◽  
Precision Engineering ◽  
Positioning Stage ◽  
Ultra Precision ◽  
Circular Notch

Along with the rapid development of semiconductor, photonics and ultra-precision engineering, ultra-precision positioning stages are becoming more necessary than ever. In this study, one novel XY micropositioning stage is proposed, in which bi-axis circular notch flexure and cantilever hinge mechanism are optimal designed as bearing to provide smooth and guided motion. The theoretical stiffness of stage is provided and verified by FEM analysis. Finally, the micro-positioning stage is built and its resolution is experimentally validated to be less than 4nm.

201 Development of Friction Drive System for Ultra-precision-positioning Stage with High Speed in Vacuum

2011 ◽  
Vol 2011.46 (0) ◽  
pp. 204-205
Author(s):  
Tomoshi ISOZAKI ◽  
Kazumasa ASUMI ◽  
Yutaka INADA ◽  
Koshi ADACHI
Keyword(s):  
High Speed ◽  
Drive System ◽  
Precision Positioning ◽  
Positioning Stage ◽  
Ultra Precision
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