scholarly journals A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters

2021 ◽  
Vol 30 (3) ◽  
pp. 92-94
Author(s):  
Ju-Hong Cha ◽  
Sang-Woo Kim ◽  
Ho-Jun Lee
2015 ◽  
Vol 96-97 ◽  
pp. 438-442
Author(s):  
Bong-ki Jung ◽  
Kyoung-Jae Chung ◽  
Young-Hwa An ◽  
Jong-Yoon Park ◽  
Y.S. Hwang

1990 ◽  
Vol 61 (1) ◽  
pp. 538-540 ◽  
Author(s):  
Yutaka Inouchi ◽  
Hideki Tanaka ◽  
Hiroshi Inami ◽  
Fumio Fukumaru ◽  
Kouzi Matsunaga

2013 ◽  
Vol 32 (4) ◽  
pp. 513-517 ◽  
Author(s):  
Ya Hong Xie ◽  
◽  
Chun Dong Hu ◽  
Sheng Liu ◽  
Cai Chao Jiang ◽  
...  

Author(s):  
Wei Liu ◽  
Qinglong Cui ◽  
Sheng Liu ◽  
Lizhen Liang ◽  
Yuanzhe Zhao ◽  
...  

2011 ◽  
Vol 82 (2) ◽  
pp. 023303 ◽  
Author(s):  
Chundong Hu ◽  
Yahong Xie ◽  
Sheng Liu ◽  
Yuanlai Xie ◽  
Caichao Jiang ◽  
...  

1974 ◽  
Vol 45 (8) ◽  
pp. 1030-1032 ◽  
Author(s):  
H. G. Mattes
Keyword(s):  

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