A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters
2021 ◽
Vol 30
(3)
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pp. 92-94
Ju-Hong Cha
◽
Sang-Woo Kim
◽
Ho-Jun Lee
2011 ◽
Vol 82
(12)
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pp. 123303
◽
Yeong-Shin Park
◽
Yuna Lee
◽
Kyoung-Jae Chung
◽
Y. S. Hwang
1987 ◽
Vol 21
(1-4)
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pp. 194-197
T. Katagawa
◽
O. Tsukakoshi
◽
S. Komiya
◽
N. Inoue
2015 ◽
Vol 96-97
◽
pp. 438-442
Bong-ki Jung
◽
Kyoung-Jae Chung
◽
Young-Hwa An
◽
Jong-Yoon Park
◽
Y.S. Hwang
2014 ◽
Vol 85
(3)
◽
pp. 033303
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P. Roychowdhury
◽
L. Mishra
◽
H. Kewlani
◽
D. S. Patil
◽
K. C. Mittal
1990 ◽
Vol 61
(1)
◽
pp. 538-540
◽
Yutaka Inouchi
◽
Hideki Tanaka
◽
Hiroshi Inami
◽
Fumio Fukumaru
◽
Kouzi Matsunaga
2018 ◽
Vol 136
◽
pp. 1365-1369
Tae-Seong Kim
◽
Bongki Jung
◽
Seung Ho Jeong
2013 ◽
Vol 32
(4)
◽
pp. 513-517
◽
Ya Hong Xie
◽
◽
Chun Dong Hu
◽
Sheng Liu
◽
Cai Chao Jiang
◽
...
Wei Liu
◽
Qinglong Cui
◽
Sheng Liu
◽
Lizhen Liang
◽
Yuanzhe Zhao
◽
...
2011 ◽
Vol 82
(2)
◽
pp. 023303
◽
Chundong Hu
◽
Yahong Xie
◽
Sheng Liu
◽
Yuanlai Xie
◽
Caichao Jiang
◽
...
1974 ◽
Vol 45
(8)
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pp. 1030-1032
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