FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM)
Scot S. Olivier
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Paul A. Bierden
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Thomas G. Bifano
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David J. Bishop
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Emily Carr
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...
J. Kompenhans
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J. Reichmuth
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R. Höcker
C. S. Moraitis
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M. L. Riethmuller
Hiroshi Tanaka
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Hiroto Sakai
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Munenori Takumi
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Haruyoshi Toyoda
Cardinal Warde
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Robert L. Hillman
2008 ◽
Vol 44
(4)
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pp. 417-424
2011 ◽
Vol 36
(7)
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pp. 1089
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Wei-Chao Chiu
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Chun-Che Chang
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Jiun-Ming Wu
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Ming-Chang M. Lee
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Jia-Min Shieh