Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

0780318331

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Fabrication of advanced integrated optical micro-encoder chip

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555836 ◽

2002 ◽

Cited By ~ 4

Author(s):

R. Sawada ◽

O. Ohguchi ◽

K. Mise ◽

M. Tsubamoto

Keyword(s):

Integrated Optical

Download Full-text

Micropump manufactured by thermoplastic molding

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555591 ◽

2002 ◽

Cited By ~ 28

Author(s):

B. Bustgens ◽

W. Bacher ◽

W. Menz ◽

W.K. Schomburg

Download Full-text

Fabrication of actuators using magnetostrictive thin films

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555597 ◽

2002 ◽

Cited By ~ 6

Author(s):

T. Honda ◽

K.I. Arai ◽

M. Yamaguchi

Keyword(s):

Thin Films

Download Full-text

A concentric build-up process to fabricate practical wobble motors

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555608 ◽

2002 ◽

Cited By ~ 7

Author(s):

H. Ogura ◽

S. Maeda ◽

K. Nakamura ◽

U. Sangawa ◽

N. Azuma ◽

...

Download Full-text

Design and fabrication of miniature relay matrix and investigation of electromechanical interference in multi-actuator systems

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555829 ◽

2002 ◽

Cited By ~ 3

Author(s):

H. Hosaka ◽

H. Kuwano

Download Full-text

Electrostatic servo system for multi-axis accelerometers

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555762 ◽

2002 ◽

Cited By ~ 6

Author(s):

K. Jono ◽

M. Hashimoto ◽

M. Esashi

Keyword(s):

Servo System

Download Full-text

Rotational control of anisotropic micro-objects by optical pressure

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555825 ◽

2002 ◽

Author(s):

E. Higurashi ◽

H. Ukita ◽

H. Tanaka ◽

O. Ohguchi

Keyword(s):

Optical Pressure

Download Full-text

A theory of manipulation and control for microfabricated actuator arrays

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555606 ◽

2002 ◽

Cited By ~ 28

Author(s):

K.-F. Bohringer ◽

B.R. Donald ◽

R. Mihailovich ◽

N.C. MacDonald

Keyword(s):

Actuator Arrays ◽

And Control ◽

Manipulation And Control

Download Full-text

Self-consistent simulation and modelling of electrostatically deformed diaphragms

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555593 ◽

2002 ◽

Cited By ~ 32

Author(s):

P. Osterberg ◽

H. Yie ◽

X. Cai ◽

J. White ◽

S. Senturia

Keyword(s):

Simulation And Modelling ◽

Self Consistent

Download Full-text

Materials for LIGA products

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems ◽

10.1109/memsys.1994.555603 ◽

2002 ◽

Cited By ~ 5

Author(s):

W. Ehrfeld ◽

M. Abraham ◽

U. Ehrfeld ◽

M. Lacher ◽

H. Lehr

Download Full-text

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic SystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Fabrication of advanced integrated optical micro-encoder chip

Micropump manufactured by thermoplastic molding

Fabrication of actuators using magnetostrictive thin films

A concentric build-up process to fabricate practical wobble motors

Design and fabrication of miniature relay matrix and investigation of electromechanical interference in multi-actuator systems

Electrostatic servo system for multi-axis accelerometers

Rotational control of anisotropic micro-objects by optical pressure

A theory of manipulation and control for microfabricated actuator arrays

Self-consistent simulation and modelling of electrostatically deformed diaphragms

Materials for LIGA products

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
Latest Publications