Microsystems and Nanotechnology
Latest Publications

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23

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2

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Published By Springer Berlin Heidelberg

9783642182921, 9783642182938

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Nanoscale Fabrication

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_14 ◽

2012 ◽

pp. 513-577

Author(s):

Ampere A. Tseng ◽

Zuliang Du ◽

Andrea Notargiacomo ◽

Shyankay Jou

Keyword(s):

Nanoscale Fabrication

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Micro/Nano Technologies and Their Biological and Medical Applications

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_21 ◽

2012 ◽

pp. 819-851

Author(s):

Chun-Wei Huang ◽

Gwo-Bin Lee

Keyword(s):

Medical Applications ◽

Biological And Medical Applications

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MEMS Processing and Fabrication Techniques and Technology—Silicon-Based Micromachining

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_9 ◽

2012 ◽

pp. 287-352 ◽

Cited By ~ 1

Author(s):

Zhihong Li ◽

Bo Liu ◽

Wei Wang

Keyword(s):

Silicon Based

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Microelectromechanical Sensor-Based System

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_17 ◽

2012 ◽

pp. 619-651

Author(s):

Zhaoying Zhou ◽

Rong Zhu ◽

Xu Fu ◽

Ganghua Zhang

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Integrated Nanotechnology Based on MEMS

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_15 ◽

2012 ◽

pp. 579-606

Author(s):

Xinxin Li

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A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_18 ◽

2012 ◽

pp. 653-719 ◽

Cited By ~ 1

Author(s):

Weijie Yun

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Applications of Microelectro-Mechanical Systems

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_16 ◽

2012 ◽

pp. 609-618

Author(s):

Wen H. Ko

Keyword(s):

Mechanical Systems

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Material Issues for Microsystems

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_3 ◽

2012 ◽

pp. 71-113

Author(s):

Bingchu Cai

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Development and Prospects

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_23 ◽

2012 ◽

pp. 899-929 ◽

Cited By ~ 1

Author(s):

Richard S. Muller ◽

Wolfgang Menz ◽

Masayoshi Esashi ◽

Geoff Beardmore

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Advancement of Laser-Assisted and Roller-Based Nanoimprinting Technology

Microsystems and Nanotechnology ◽

10.1007/978-3-642-18293-8_12 ◽

2012 ◽

pp. 449-493

Author(s):

Yung-Chun Lee ◽

Fei-Bin Hsiao

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