[1991] Proceedings. IEEE Micro Electro Mechanical Systems
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Published By IEEE

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Electrohydrodynamic pumping and flow measurement

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114809 ◽

2002 ◽

Cited By ~ 19

Author(s):

A. Richter ◽

A. Plettner ◽

K.A. Hofmann ◽

H. Sandmaier

Keyword(s):

Flow Measurement

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A piezo-electric pump driven by a flexural progressive wave

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114811 ◽

2002 ◽

Cited By ~ 14

Author(s):

S. Miyazaki ◽

T. Kawai ◽

M. Araragi

Keyword(s):

Electric Pump ◽

Progressive Wave ◽

Piezo Electric

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A development of micro sheath flow chamber

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114808 ◽

2002 ◽

Cited By ~ 16

Author(s):

R. Miyake ◽

H. Ohki ◽

I. Yamazaki ◽

R. Yabe

Keyword(s):

Flow Chamber ◽

Sheath Flow

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In situ observation and analysis of wet etching process for micro electro-mechanical systems

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114776 ◽

2002 ◽

Cited By ~ 2

Author(s):

O. Tabata ◽

K. Shimaoka ◽

S. Sugiyama

Keyword(s):

Mechanical Systems ◽

Wet Etching ◽

Etching Process ◽

In Situ Observation ◽

Micro Electro Mechanical Systems

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Normal and tangential impact in micro electromechanical structures

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114763 ◽

2002 ◽

Cited By ~ 7

Author(s):

A.P. Lee ◽

A.P. Pisano ◽

L. Lin

Keyword(s):

Tangential Impact

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Film actuators: Planar, electrostatic surface-drive actuators

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114761 ◽

2002 ◽

Cited By ~ 26

Author(s):

S. Egawa ◽

T. Niino ◽

T. Higuchi

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Crystalline lattice for metrology and positioning control

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114803 ◽

2002 ◽

Cited By ~ 2

Author(s):

H. Kawakatsu ◽

Y. Hoshi ◽

H. Kitano ◽

T. Higuchi

Keyword(s):

Crystalline Lattice ◽

Positioning Control

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Fabrication of micro-structures using non-planar lithography (NPL)

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114767 ◽

2002 ◽

Cited By ~ 15

Author(s):

S.C. Jacobsen ◽

D.L. Wells ◽

C.C. Davis ◽

J.E. Wood

Keyword(s):

Micro Structures

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Polysilicon microstructures

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114793 ◽

2002 ◽

Cited By ~ 7

Author(s):

M.M. Farooqui ◽

A.G.R. Evans

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Micro-step XY-stage using piezoelectric tube actuator

[1991] Proceedings. IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1991.114784 ◽

2002 ◽

Cited By ~ 10

Author(s):

R. Matsuda ◽

R. Kaneko

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[1991] Proceedings. IEEE Micro Electro Mechanical SystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Electrohydrodynamic pumping and flow measurement

A piezo-electric pump driven by a flexural progressive wave

A development of micro sheath flow chamber

In situ observation and analysis of wet etching process for micro electro-mechanical systems

Normal and tangential impact in micro electromechanical structures

Film actuators: Planar, electrostatic surface-drive actuators

Crystalline lattice for metrology and positioning control

Fabrication of micro-structures using non-planar lithography (NPL)

Polysilicon microstructures

Micro-step XY-stage using piezoelectric tube actuator

[1991] Proceedings. IEEE Micro Electro Mechanical Systems
Latest Publications