Lithography for VLSI - VLSI Electronics Microstructure Science
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14

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Published By Elsevier

9780122341168

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The Evolution of Electron-Beam Pattern Generators for Integrated Circuit Masks at AT&T Bell Laboratories

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50008-3 ◽

1987 ◽

pp. 57-102 ◽

Cited By ~ 2

Author(s):

D.S. ALLES ◽

M.G.R. THOMSON

Keyword(s):

Electron Beam ◽

Integrated Circuit ◽

Beam Pattern ◽

Pattern Generators

Ion-Beam Lithography

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50010-1 ◽

1987 ◽

pp. 147-227

Author(s):

BENJAMIN M. SIEGEL

Keyword(s):

Ion Beam ◽

Ion Beam Lithography

Optical Lithography

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50006-x ◽

1987 ◽

pp. 1-17 ◽

Cited By ~ 1

Author(s):

R.K. WATTS

Keyword(s):

Optical Lithography

Copyright page

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50003-4 ◽

1987 ◽

pp. iv

Electrical Measurements for Characterizing Lithography

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50013-7 ◽

1987 ◽

pp. 319-356

Author(s):

CHRISTOPHER P. AUSSCHNITT

Keyword(s):

Electrical Measurements

Front Matter

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50002-2 ◽

1987 ◽

pp. iii

Alignment Techniques in Optical and X-Ray Lithography

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50011-3 ◽

1987 ◽

pp. 229-264 ◽

Cited By ~ 1

Author(s):

M. FELDMAN

Keyword(s):

X Ray

Preface

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50005-8 ◽

1987 ◽

pp. xi

Electron Resist Process Modeling

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50009-5 ◽

1987 ◽

pp. 103-145

Author(s):

N. EIB ◽

D. KYSER ◽

R. PYLE

Keyword(s):

Process Modeling

List of Contributors

Lithography for VLSI - VLSI Electronics Microstructure Science ◽

10.1016/b978-0-12-234116-8.50004-6 ◽

1987 ◽

pp. ix