Advances in Patterning Materials and Processes XXXV
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53
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Published By SPIE

9781510616646, 9781510616653
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Computational enablement for designs with sub-20nm metal tip to tip using cut shapes from grapho-epitaxy directed self-assembly

2018 ◽  
Author(s):  
Balint Meliorisz ◽  
Ulrich Welling ◽  
Hans-Jürgen Stock ◽  
Sajan Marokkey ◽  
Thomas Mülders ◽  
...  
Keyword(s):  
Self Assembly ◽  
Metal Tip

Multi-color fly-cut-SAQP for reduced process variation

2018 ◽  
Author(s):  
Richard A. Farrell ◽  
Elliott Franke ◽  
Angelique Raley ◽  
Akitero Ko ◽  
Peter Biolsi ◽  
...  
Keyword(s):  
Process Variation

Polymer brush as adhesion promoter for EUV patterning

2018 ◽  
Author(s):  
Jing Guo ◽  
Anuja De Silva ◽  
Yann Mignot ◽  
Yongan Xu ◽  
Abraham Arceo de la Peña ◽  
...  
Keyword(s):  
Polymer Brush ◽  
Adhesion Promoter

New spin on carbon materials made from hemicellulose for hardmask layer

2018 ◽  
Author(s):  
Kazuyo Morita ◽  
Kimiko Yamamoto ◽  
Masahiko Harumoto ◽  
Yuji Tanaka ◽  
Chisayo Nakayama ◽  
...  
Keyword(s):  
Carbon Materials

EUV resist sensitization and roughness improvement by PSCAR with in-line flood exposure system (Conference Presentation)

2018 ◽  
Author(s):  
Michael Carcasi ◽  
Tomoki Nagai ◽  
Motoyuki Shima ◽  
Toru Kimura ◽  
Takehiko Naruoka ◽  
...  
Keyword(s):  
Exposure System ◽  
Flood Exposure

Molecular organometallic resists for EUV (MORE): Reactivity as a function of metal center (Bi, Sb, Te and Sn)

2018 ◽  
Author(s):  
Jacob Sitterly ◽  
Michael Murphy ◽  
Steven Grzeskowiak ◽  
Gregory Denbeaux ◽  
Robert L. Brainard
Keyword(s):  
Metal Center
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