2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
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9781424417926, 9781424417933

Author(s):  
K. Gerasopoulos ◽  
M. McCarthy ◽  
E. Royston ◽  
J.N. Culver ◽  
R. Ghodssi

Author(s):  
F. Schneider ◽  
D. Eberhard ◽  
D. Strohmeier ◽  
C. Muller ◽  
U. Wallrabe

Author(s):  
H.-W. Lu ◽  
F. Bottausci ◽  
A. L. Bertozzi ◽  
C. D. Meinhart ◽  
C.-J. Kim

Author(s):  
N. Arellano ◽  
E. P. Quevy ◽  
J. Provine ◽  
R. Maboudian ◽  
R. T. Howe
Keyword(s):  

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