Nanolithography
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Published By Elsevier

9780857095008
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Nanophotonics: devices for manipulating light at the nanoscale

2014 ◽  
pp. 376-398
Author(s):  
P. Dastmalchi ◽  
A. Haddadpour ◽  
G. Veronis

Sidewall roughness in nanolithography: origins, metrology and device effects

2014 ◽  
pp. 503-537 ◽  
Author(s):  
V. Constantoudis ◽  
E. Gogolides ◽  
G.P. Patsis
Keyword(s):  
Sidewall Roughness

Copyright

2014 ◽  
pp. iv

Chemistry and processing of resists for nanolithography

2014 ◽  
pp. 194-286
Author(s):  
A. Novembre ◽  
S. Liu

Index

2014 ◽  
pp. 551-573

Nanostructures: fabrication and applications

2014 ◽  
pp. 348-375 ◽  
Author(s):  
X. Cheng

Extreme ultraviolet (EUV) lithography

2014 ◽  
pp. 42-79 ◽  
Author(s):  
B.J. Rice
Keyword(s):  
Extreme Ultraviolet ◽  
Euv Lithography

Nanodevices: fabrication, prospects for low dimensional devices and applications

2014 ◽  
pp. 399-423 ◽  
Author(s):  
T. Daniels-Race
Keyword(s):  
Low Dimensional

Front matter

2014 ◽  
pp. i-iii
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