Nanolithography
Latest Publications

TOTAL DOCUMENTS

23

(FIVE YEARS 0)

H-INDEX

3

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Published By Elsevier

9780857095008

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Copyright

Nanolithography ◽

10.1016/b978-0-85709-500-8.50019-1 ◽

2014 ◽

pp. iv

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Chemistry and processing of resists for nanolithography

Nanolithography ◽

10.1533/9780857098757.194 ◽

2014 ◽

pp. 194-286

Author(s):

A. Novembre ◽

S. Liu

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Nanophotonics: devices for manipulating light at the nanoscale

Nanolithography ◽

10.1533/9780857098757.376 ◽

2014 ◽

pp. 376-398

Author(s):

P. Dastmalchi ◽

A. Haddadpour ◽

G. Veronis

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Sidewall roughness in nanolithography: origins, metrology and device effects

Nanolithography ◽

10.1533/9780857098757.503 ◽

2014 ◽

pp. 503-537 ◽

Author(s):

V. Constantoudis ◽

E. Gogolides ◽

G.P. Patsis

Keyword(s):

Sidewall Roughness

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Index

Nanolithography ◽

10.1016/b978-0-85709-500-8.50023-3 ◽

2014 ◽

pp. 551-573

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Extreme ultraviolet (EUV) lithography

Nanolithography ◽

10.1533/9780857098757.42 ◽

2014 ◽

pp. 42-79 ◽

Author(s):

B.J. Rice

Keyword(s):

Extreme Ultraviolet ◽

Euv Lithography

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Nanodevices: fabrication, prospects for low dimensional devices and applications

Nanolithography ◽

10.1533/9780857098757.399 ◽

2014 ◽

pp. 399-423 ◽

Author(s):

T. Daniels-Race

Keyword(s):

Low Dimensional

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Front matter

Nanolithography ◽

10.1016/b978-0-85709-500-8.50018-x ◽

2014 ◽

pp. i-iii

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Woodhead Publishing Series in Electronic and Optical Materials

Nanolithography ◽

10.1016/b978-0-85709-500-8.50021-x ◽

2014 ◽

pp. xvii-xxi

Keyword(s):

Optical Materials

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Nanostructures: fabrication and applications

Nanolithography ◽

10.1533/9780857098757.348 ◽

2014 ◽

pp. 348-375 ◽

Author(s):

X. Cheng

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