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Micromechanics and MEMS
Latest Publications
TOTAL DOCUMENTS
19
(FIVE YEARS 0)
H-INDEX
0
(FIVE YEARS 0)
Published By IEEE
9780470545263, 0470545267
Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
Related Keywords
Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
Related Keywords
Section 5: Magnetic Actuators
Micromechanics and MEMS
◽
10.1109/9780470545263.sect5
◽
2009
◽
Keyword(s):
Magnetic Actuators
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About the Editor
Micromechanics and MEMS
◽
10.1109/9780470545263.bioed
◽
2009
◽
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Section 8: Valves and Pumps
Micromechanics and MEMS
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10.1109/9780470545263.sect8
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2009
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Keyword(s):
Section 8
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Section 6: Harmonic Motors
Micromechanics and MEMS
◽
10.1109/9780470545263.sect6
◽
2009
◽
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Section 3: Comb Drive Actuators
Micromechanics and MEMS
◽
10.1109/9780470545263.sect3
◽
2009
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Keyword(s):
Comb Drive
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Section 7: Other Actuators
Micromechanics and MEMS
◽
10.1109/9780470545263.sect7
◽
2009
◽
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Section 13: ComputerAided Design
Micromechanics and MEMS
◽
10.1109/9780470545263.sect13
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2009
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Section 12: LIGA
Micromechanics and MEMS
◽
10.1109/9780470545263.sect12
◽
2009
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Section 11: Bulk Micromachining
Micromechanics and MEMS
◽
10.1109/9780470545263.sect11
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2009
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Editor's Notes on the Second Printing
Micromechanics and MEMS
◽
10.1109/9780470545263.notesed
◽
2009
◽
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