Novel Patterning Technologies 2021
Latest Publications

TOTAL DOCUMENTS

42
(FIVE YEARS 42)

H-INDEX

0
(FIVE YEARS 0)

Published By SPIE

9781510640535, 9781510640542
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

scholarly journals Front Matter: Volume 11610

2021 ◽  
Keyword(s):  
Matter Volume

Multi-beam mask writer in EUV era: challenges and opportunities

2021 ◽  
Author(s):  
Bassam Shamoun ◽  
Mahesh Chandramouli ◽  
Bin Liu ◽  
Reid Juday ◽  
Igal Bucay ◽  
...  
Keyword(s):  
Challenges And Opportunities

Post-Moore: prospects for novel patterning of low volume ICs

2021 ◽  
Author(s):  
Michael Fritze
Keyword(s):  
Low Volume

Multi-beam mask writer MBM-2000 (Conference Presentation)

2021 ◽  
Author(s):  
Hiroshi Matsumoto ◽  
Keisuke Yamaguchi ◽  
Hayato Kimura ◽  
Noriaki Nakayamada

Micro LED displays: technology and manufacturing challenges

2021 ◽  
Author(s):  
Khaled Ahmed

Programmable assembly of organized 3D nanosystems

2021 ◽  
Author(s):  
Oleg Gang

DNA origami: the bridge from top to bottom

2021 ◽  
Author(s):  
Ashwin Gopinath
Keyword(s):  
Dna Origami

Overlay models for nanoimprint lithography

2021 ◽  
Author(s):  
Nilabh Roy ◽  
Mario Meissl ◽  
Takahiro Yoshida ◽  
Xiaoming Lu ◽  
Jeff Klein ◽  
...  
Keyword(s):  
Nanoimprint Lithography

Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography

2021 ◽  
Author(s):  
Fabian Holzmeier ◽  
Kevin Dorney ◽  
Esben W. Larsen ◽  
Thomas Nuytten ◽  
Dhirendra P. Singh ◽  
...  
Keyword(s):  
Small Pitch ◽  
Kinetics Of

Programmable directed micro-assembly

2021 ◽  
Author(s):  
Eugene Chow ◽  
Brad Rupp ◽  
Jeng Ping Lu ◽  
Anne Plochowietz ◽  
Lara Crawford ◽  
...  
Keyword(s):  
Micro Assembly
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