2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)
Latest Publications

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Applications of micro-systems technology for characterization and detection of microorganisms

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992730 ◽

2002 ◽

Author(s):

R. Bashir ◽

R. Gomez ◽

H. Chang ◽

M. Ladisch ◽

A. Bhunia

Keyword(s):

Micro Systems

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Electrical through-wafer interconnects with sub-picofarad parasitic capacitance [MEMS packaging]

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992732 ◽

2002 ◽

Cited By ~ 2

Author(s):

C.H. Cheng ◽

A.S. Ergun ◽

B.T. Khuri-Yakub

Keyword(s):

Parasitic Capacitance ◽

Mems Packaging

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A fast method for analysis and modeling of optical MEMS switches

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992741 ◽

2002 ◽

Cited By ~ 2

Author(s):

M.A. Basha ◽

A. Rohani ◽

S. Safavi-Naeini

Keyword(s):

Fast Method ◽

Optical Mems ◽

Mems Switches

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Advanced lithography for high aspect ratio MEMS technology

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992746 ◽

2002 ◽

Author(s):

R. Islam ◽

C. Brubaker

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Mems Technology

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Probe-based recording technology: a MEMS perspective

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992736 ◽

2002 ◽

Cited By ~ 1

Author(s):

S. Naberhuis

Keyword(s):

Recording Technology

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A zipper-action differential micro-mechanical tunable capacitor

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992735 ◽

2002 ◽

Cited By ~ 2

Author(s):

G.V. Ionis ◽

A. Dec ◽

K. Suyama

Keyword(s):

Tunable Capacitor

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Diamond microelectromechanical sensors for pressure and acceleration sensing

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992739 ◽

2002 ◽

Cited By ~ 3

Author(s):

K.C. Holmes ◽

J.L. Davidson ◽

W.P. Kang ◽

A.L. Stemberg

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BioMEMS and microfluidics applications of surface micromachining technology

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992727 ◽

2002 ◽

Author(s):

M. Okandan ◽

P. Galambos ◽

S. Mani ◽

J. Jakubczak

Keyword(s):

Surface Micromachining

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Micromachined piezoelectric ultrasonic imaging transducer

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992751 ◽

2002 ◽

Cited By ~ 1

Author(s):

H. Mohamed ◽

D. Polla ◽

E. Ebbini ◽

S. Zurn

Keyword(s):

Ultrasonic Imaging

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Design and analysis of a micro reciprocating engine for the time multiplexed deep etching process

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) ◽

10.1109/memsc.2001.992749 ◽

2002 ◽

Author(s):

K.C. Jiang ◽

H. Yang ◽

P.D. Prewett

Keyword(s):

Etching Process ◽

Deep Etching ◽

Reciprocating Engine

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2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Applications of micro-systems technology for characterization and detection of microorganisms

Electrical through-wafer interconnects with sub-picofarad parasitic capacitance [MEMS packaging]

A fast method for analysis and modeling of optical MEMS switches

Advanced lithography for high aspect ratio MEMS technology

Probe-based recording technology: a MEMS perspective

A zipper-action differential micro-mechanical tunable capacitor

Diamond microelectromechanical sensors for pressure and acceleration sensing

BioMEMS and microfluidics applications of surface micromachining technology

Micromachined piezoelectric ultrasonic imaging transducer

Design and analysis of a micro reciprocating engine for the time multiplexed deep etching process

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)
Latest Publications