Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176)

A new silicon rate gyroscope

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659828 ◽

2002 ◽

Cited By ~ 14

Author(s):

W. Geiger ◽

B. Folkmer ◽

J. Merz ◽

H. Sandmaier ◽

W. Lang

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High precision electrostatic actuator with novel electrode design

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659791 ◽

2002 ◽

Author(s):

A. Yamamoto ◽

T. Nino ◽

T. Higuchi

Keyword(s):

High Precision ◽

Electrode Design ◽

Electrostatic Actuator

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Flexible integration of nonsilicon microstructures on microelectronic circuits

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659765 ◽

2002 ◽

Cited By ~ 2

Author(s):

K.-D. Muller ◽

W. Bacher ◽

M. Heckele

Keyword(s):

Flexible Integration

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MAMOS-a novel displacement sensitive transducer for fully digital integrated ac accelerometer

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659780 ◽

2002 ◽

Cited By ~ 1

Author(s):

Y. Yee ◽

M. Park ◽

S.-H. Lee ◽

S. Lee ◽

K. Chun ◽

...

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The fabrication of a micro injector actuated by boiling and/or electrolysis

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659728 ◽

2002 ◽

Author(s):

S.W. Lee ◽

O.C. Jeong ◽

S.S. Yang

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Nano-channel on quartz-chip laboratory using single molecular detectable thermal lens microscope

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659741 ◽

2002 ◽

Cited By ~ 4

Author(s):

K. Matsumoto ◽

T. Kawakami ◽

M. Nakao ◽

Y. Hatamura ◽

T. Kitamori ◽

...

Keyword(s):

Thermal Lens ◽

Nano Channel

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Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659824 ◽

2002 ◽

Cited By ~ 4

Author(s):

W. Kronast ◽

B. Muller ◽

W. Siedel ◽

A. Stoffel

Keyword(s):

Porous Silicon ◽

Sacrificial Layer ◽

Air Gap ◽

Single Chip ◽

Condenser Microphone

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A low power, small, electrostatically-driven commercial inkjet head

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659730 ◽

2002 ◽

Cited By ~ 24

Author(s):

S. Kamisuki ◽

T. Hagata ◽

C. Tezuka ◽

Y. Nose ◽

M. Fujii ◽

...

Keyword(s):

Low Power

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Deep micromachining of insulating materials by etching of laterally constrained distributions of ion tracks

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659756 ◽

2002 ◽

Cited By ~ 2

Author(s):

G. Thornell ◽

H. Bengtsson ◽

R. Spohr ◽

E.J. Van Veldhuizen ◽

L. Westerberg ◽

...

Keyword(s):

Insulating Materials ◽

Ion Tracks

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A micro cell lysis device

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659798 ◽

2002 ◽

Cited By ~ 4

Author(s):

S.W. Lee ◽

H. Yowanto ◽

Y.C. Tai

Keyword(s):

Cell Lysis

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A new silicon rate gyroscope

High precision electrostatic actuator with novel electrode design

Flexible integration of nonsilicon microstructures on microelectronic circuits

MAMOS-a novel displacement sensitive transducer for fully digital integrated ac accelerometer

The fabrication of a micro injector actuated by boiling and/or electrolysis

Nano-channel on quartz-chip laboratory using single molecular detectable thermal lens microscope

Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap

A low power, small, electrostatically-driven commercial inkjet head

Deep micromachining of insulating materials by etching of laterally constrained distributions of ion tracks

A micro cell lysis device

Export Citation Format

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A new silicon rate gyroscope

High precision electrostatic actuator with novel electrode design

Flexible integration of nonsilicon microstructures on microelectronic circuits

MAMOS-a novel displacement sensitive transducer for fully digital integrated ac accelerometer

The fabrication of a micro injector actuated by boiling and/or electrolysis

Nano-channel on quartz-chip laboratory using single molecular detectable thermal lens microscope

Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap

A low power, small, electrostatically-driven commercial inkjet head

Deep micromachining of insulating materials by etching of laterally constrained distributions of ion tracks

A micro cell lysis device

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176)
Latest Publications