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2020 China Semiconductor Technology International Conference (CSTIC)
Latest Publications
TOTAL DOCUMENTS
222
(FIVE YEARS 222)
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0
(FIVE YEARS 0)
Published By IEEE
9781728165585
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Latest Documents
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Impact of Bevel Condition on STI CMP Scratch
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282450
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2020
◽
Author(s):
Yuanyuan Meng
◽
Lei Zhang
◽
Yibin Li
◽
Wei Zhang
◽
Haifeng Zhou
◽
...
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The Solution of AIO-ET Via Open and Process Window Improvement
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282421
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2020
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Author(s):
Baichun Zhang
◽
Jianguo Yang
◽
Lei Sun
◽
Quanbo Li
◽
Jun Huang
◽
...
Keyword(s):
Process Window
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Effect of Complexing Agent in Slurry on CMP Property for Barrier Material Cobalt
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282460
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2020
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Author(s):
Jinsong Zuo
◽
Fang Wang
◽
Kai Hu
◽
Luguang Wang
◽
Yujie Yuan
◽
...
Keyword(s):
Complexing Agent
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Barrier Material
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Effective Lithography Leveling Improvement was Achieved by Retaining Wafer Back-Surface Nitride During a Novel SMT Nitride Remove Process
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282466
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2020
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Author(s):
Weiwei Ma
◽
Chao Sun
◽
Xiaolin Xu
◽
Wei Zhou
Keyword(s):
Back Surface
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Litho Process Optimization to Improve Overlay Measurement in Thick PR Layer
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282547
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2020
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Author(s):
Jiantao Wang
◽
Jun Yu
◽
Yuming Sun
◽
Cong Zhang
◽
Xiaobo Guo
◽
...
Keyword(s):
Process Optimization
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Monolithic 3D Enabled Processing-in- SRAM Memory
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282479
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2020
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Author(s):
Vijaykrishnan Narayanan
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Nagadastagiri Challapalle
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Ikenna Okafor
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Srivatsa Srinivasa
◽
Nicholas Jao
Keyword(s):
Sram Memory
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Narrow-Band Mask Synthesis with Semi-Implicit Difference
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282545
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2020
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Author(s):
Yijiang Shen
◽
XiaoPeng Wang
Keyword(s):
Narrow Band
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SRAM and Single Device Isolation analysis in FinFET Technology
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282388
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2020
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Author(s):
Yijun Zhang
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Li Tan
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Yu Li
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Non Linear Growth of Variance in the Process Gaps. A Cause of Adverse Cycle Times
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282532
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2020
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Author(s):
George W Horn
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William Podgorski
Keyword(s):
Linear Growth
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Cycle Times
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Non Linear
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Application of a Bevel Etch Process for Improving Particle Performance in CMOS Image Sensor Manufacture
2020 China Semiconductor Technology International Conference (CSTIC)
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10.1109/cstic49141.2020.9282503
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2020
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Author(s):
Yiling Sun
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Jihong Zhang
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Yu Jiang
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Fulong Qiao
◽
Keqiang He
◽
...
Keyword(s):
Cmos Image Sensor
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Image Sensor
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