High Power Impulse Magnetron Sputtering Latest Publications

10.1016/b978-0-12-812454-3.00010-3 ◽

2020 ◽

pp. 159-221 ◽

Cited By ~ 2

Author(s):

Tiberiu Minea ◽

Tomáš Kozák ◽

Claudiu Costin ◽

Jon Tomas Gudmundsson ◽

Daniel Lundin

Keyword(s):

Magnetron Sputtering ◽

High Power

Synthesis of thin films and coatings by high power impulse magnetron sputtering

10.1016/b978-0-12-812454-3.00013-9 ◽

2020 ◽

pp. 333-374 ◽

Author(s):

Kostas Sarakinos ◽

Ludvik Martinu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

High Power

10.1016/b978-0-12-812454-3.00004-8 ◽

2020 ◽

pp. v-x

Index

10.1016/b978-0-12-812454-3.00014-0 ◽

2020 ◽

pp. 375-384

Heavy species dynamics in high power impulse magnetron sputtering discharges

10.1016/b978-0-12-812454-3.00009-7 ◽

2020 ◽

pp. 111-158 ◽

Cited By ~ 3

Author(s):

Martin Čada ◽

Nikolay Britun ◽

Ante Hecimovic ◽

Jon Tomas Gudmundsson ◽

Daniel Lundin

Keyword(s):

Magnetron Sputtering ◽

High Power ◽

Species Dynamics

Electron dynamics in high power impulse magnetron sputtering discharges

10.1016/b978-0-12-812454-3.00008-5 ◽

2020 ◽

pp. 81-110 ◽

Author(s):

Martin Čada ◽

Jon Tomas Gudmundsson ◽

Daniel Lundin

Keyword(s):

Magnetron Sputtering ◽

High Power ◽

Electron Dynamics

Introduction to magnetron sputtering

10.1016/b978-0-12-812454-3.00006-1 ◽

2020 ◽

pp. 1-48 ◽

Author(s):

Jon Tomas Gudmundsson ◽

Daniel Lundin

Keyword(s):

Magnetron Sputtering

Contributors

10.1016/b978-0-12-812454-3.00005-x ◽

2020 ◽

pp. xi-xii

Author(s):

André Anders ◽

Nils Brenning ◽

Nikolay Britun ◽

Martin Čada ◽

Claudiu Costin ◽

...

Hardware and power management for high power impulse magnetron sputtering

10.1016/b978-0-12-812454-3.00007-3 ◽

2020 ◽

pp. 49-80 ◽

Author(s):

Zdeněk Hubička ◽

Jon Tomas Gudmundsson ◽

Petter Larsson ◽

Daniel Lundin

Keyword(s):

Magnetron Sputtering ◽

Power Management ◽

High Power

Preface

10.1016/b978-0-12-812454-3.00015-2 ◽

2020 ◽

pp. xiii-xiv

Author(s):

Daniel Lundin ◽

Tiberiu Minea ◽

Jon Tomas Gudmundsson