IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings
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Automated metrology for increased throughput and reliability

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.558035 ◽

2002 ◽

Author(s):

E.E. Chain

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Comparison of patterned wafer defect detection tools for general in-line monitors

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.557979 ◽

2002 ◽

Author(s):

R. Ceton ◽

R. Goodner ◽

Fourmun Lee ◽

Ping Wang

Keyword(s):

Defect Detection

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The development and optimization of the photoresist module qualification procedure

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.558024 ◽

2002 ◽

Author(s):

J. Thornton ◽

R. Goodner ◽

Ping Wang

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Forming business partnerships with foreign corporations

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.558004 ◽

2002 ◽

Author(s):

L.L. Wagner

Keyword(s):

Business Partnerships ◽

Foreign Corporations

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Semiconductor factory automation: designing for phased automation

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.558000 ◽

2002 ◽

Author(s):

D.C. Gardner

Keyword(s):

Factory Automation

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Semiconductor business, process, product and fab influence on throughput, cycle time and chip cost

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.557984 ◽

2002 ◽

Author(s):

C. Kraft

Keyword(s):

Business Process ◽

Process Product

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The SHOP tracking and notification system

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.557966 ◽

2002 ◽

Author(s):

R.J. Trexler

Keyword(s):

Notification System

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Engineering data analysis using Discovery [semiconductor manufacture]

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.558100 ◽

2002 ◽

Author(s):

L. Fowler ◽

T. Davis

Keyword(s):

Data Analysis ◽

Engineering Data

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Key considerations in the development of defect sampling methodologies

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.557977 ◽

2002 ◽

Author(s):

M. McIntyre ◽

R.K. Nurani ◽

R. Akella

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Using queueing curve approximations in a fab to determine productivity improvements

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.557985 ◽

2002 ◽

Author(s):

L. Sattler

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