Sputtering by Particle Bombardment II - Topics in Applied Physics
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Published By Springer Berlin Heidelberg

9783540125938, 9783540386599

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Chemical sputtering

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_3 ◽

1983 ◽

pp. 91-146 ◽

Author(s):

Joachim Roth

Keyword(s):

Chemical Sputtering

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Sputtering of solids with neutrons

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_5 ◽

1983 ◽

pp. 179-229 ◽

Author(s):

Rainer Behrisch

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Heavy ion sputtering induced surface topography development

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_6 ◽

1983 ◽

pp. 231-269 ◽

Author(s):

George Carter ◽

Boris Navinšek ◽

James L. Whitton

Keyword(s):

Surface Topography ◽

Heavy Ion ◽

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Development of surface topography due to gas ion implantation

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_7 ◽

1983 ◽

pp. 271-355 ◽

Author(s):

Bernhard M. U. Scherzer

Keyword(s):

Ion Implantation ◽

Surface Topography

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Sputtering of multicomponent materials

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_2 ◽

1983 ◽

pp. 11-90 ◽

Author(s):

Gerhard Betz ◽

Gottfried K. Wehner

Keyword(s):

Multicomponent Materials

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Sputtering by electrons and photons

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_4 ◽

1983 ◽

pp. 147-178 ◽

Author(s):

Peter C. Townsend

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Introduction and overview

Sputtering by Particle Bombardment II - Topics in Applied Physics ◽

10.1007/3-540-12593-0_1 ◽

1983 ◽

pp. 1-10 ◽

Author(s):

Rainer Behrisch

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