Towards Synthesis of Micro-/Nano-systems
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Published By Springer London

9781846285585
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Study on Subsurface Damage Generated in Ground Si Wafer

2006 ◽  
pp. 309-313 ◽  
Author(s):  
Bahman Soltani Hosseini ◽  
Libo Zhou ◽  
Tatsuya Tsuruga ◽  
Jun Shimizu ◽  
Hiroshi Eda ◽  
...  
Keyword(s):  
Subsurface Damage ◽  
Si Wafer

Surfaces Formation of Precision ELID Grinding Rock Minerals

2006 ◽  
pp. 301-304
Author(s):  
Jianyun Shen ◽  
Weimin Lin ◽  
Hitoshi Ohmori ◽  
Xipeng Xu
Keyword(s):  
Elid Grinding ◽  
Rock Minerals

Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray

2006 ◽  
pp. 295-300
Author(s):  
Hirokatsu Yumoto ◽  
Hidekazu Mimura ◽  
Satoshi Matsuyama ◽  
Souichiro Handa ◽  
Kazuya Yamamura ◽  
...  
Keyword(s):  
X Ray

Milling-Combined Laser Metal Sintering System and Production of Injection Molds with Sophisticated Functions

2006 ◽  
pp. 285-290 ◽  
Author(s):  
Satoshi Abe ◽  
Yoshikazu Higashi ◽  
Isao Fuwa ◽  
Norio Yoshida ◽  
Takeshi Yoneyama
Keyword(s):  
Metal Sintering

High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for Semiconductor Lithography Apparatus

2006 ◽  
pp. 329-330
Author(s):  
Alex Ka Tim Poon ◽  
Fukunosuke Nishimatsu ◽  
Masahiro Totsu ◽  
Leonard Kho ◽  
Gaurav Keswani
Keyword(s):  
Phase Change ◽  
Cooling System ◽  
High Capacity ◽  
High Accuracy ◽  
Motor Cooling

Development of Rectangular Microblasting Nozzle

2006 ◽  
pp. 181-186
Author(s):  
Masaki Sugimoto ◽  
Toshihiko Shakouchi

Laser Interferometric Measurement of Involute Profile by Rolling of Artifact

2006 ◽  
pp. 89-93 ◽  
Author(s):  
Fumi Takeoka ◽  
Masaharu Komori ◽  
Aizoh Kubo ◽  
Hiroshige Fujio ◽  
Shigeaki Taniyama ◽  
...  
Keyword(s):  
Interferometric Measurement ◽  
Laser Interferometric
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