Advances in Metrology for X-Ray and EUV Optics VIII
Latest Publications

TOTAL DOCUMENTS

24
(FIVE YEARS 24)

H-INDEX

1
(FIVE YEARS 1)

Published By SPIE

9781510629110, 9781510629127
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Diffraction compensation of slope errors on strongly curved grating substrates

2019 ◽  
Author(s):  
Christoph Braig ◽  
Jürgen Probst ◽  
Enrico Langlotz ◽  
Ilko Rahneberg ◽  
Michael Kühnel ◽  
...  

scholarly journals Collaborative development of diffraction-limited beamline optical systems at US DOE light sources

2019 ◽  
Author(s):  
Kenneth A. Goldberg ◽  
Antoine Wojdyla ◽  
Diane Bryant ◽  
Weilun Chao ◽  
Daniele Cocco ◽  
...  
Keyword(s):  
Optical Systems ◽  
Light Sources ◽  
Collaborative Development

High-accuracy autocollimator calibration by interferometric 2D angle generator

2019 ◽  
Author(s):  
Ville Heikkinen ◽  
Ville Byman ◽  
M. Shpak ◽  
Ralf D. Geckeler ◽  
Andreas Just ◽  
...  
Keyword(s):  
High Accuracy

scholarly journals Controlling an active bimorph deformable mirror with sub-nanometre resolution

2019 ◽  
Author(s):  
Ioana-Theodora Nistea ◽  
Simon G. Alcock ◽  
Vivek Badami ◽  
Riccardo Signorato ◽  
Kawal J. S. Sawhney
Keyword(s):  
Deformable Mirror

scholarly journals Investigation on lateral resolution of surface slope profilers

2019 ◽  
Author(s):  
Valeriy V. Yashchuk ◽  
Ian Lacey ◽  
Thomas Arnold ◽  
Hendrik Paetzelt ◽  
Simon M. Rochester ◽  
...  
Keyword(s):  
Lateral Resolution ◽  
Surface Slope

scholarly journals Ion beam figuring and optical metrology system for synchrotron x-ray mirrors

2019 ◽  
Author(s):  
Matthew Hand ◽  
Simon G. Alcock ◽  
Michael Hillman ◽  
Richard Littlewood ◽  
Simone Moriconi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Optical Metrology ◽  
X Ray ◽  
Metrology System ◽  
Ion Beam Figuring
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