Quick and precise position control of ultrasonic motor using hybrid control
1996 ◽
Vol 116
(3)
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pp. 83-95
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2007 ◽
Vol 43
(4)
◽
pp. 934-941
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2004 ◽
Vol 70
(694)
◽
pp. 1715-1721
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1995 ◽
Vol 115
(11)
◽
pp. 1333-1340
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Keyword(s):
1996 ◽
Vol 80
(2)
◽
pp. 191-200
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2003 ◽
Vol 69
(681)
◽
pp. 1289-1294
◽
2002 ◽
Vol 122
(8)
◽
pp. 1317-1324
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