Agile Simulation Model of Semiconductor Manufacturing

Author(s):  
Igor Stogniy ◽  
Mikhail Kruglov ◽  
Mikhail Ovsyannikov
1998 ◽  
Vol 94 (3) ◽  
pp. 417-433 ◽  
Author(s):  
MARTIN VAN DER HOEF ◽  
PAUL MADDEN

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