Convergence of Finite Element Approximations for Generalized Marguerre–von Kármán Equations

2014 ◽  
pp. 97-106 ◽  
Author(s):  
A. Ghezal ◽  
D. A. Chacha
Keyword(s):  
Finite Element ◽  
Finite Element Approximations ◽  
Von Karman ◽  
Von Kármán Equations ◽  
Von Kármán

scholarly journals A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 714
Author(s):  
Jiujiang Wang ◽  
Xin Liu ◽  
Yuanyu Yu ◽  
Yao Li ◽  
Ching-Hsiang Cheng ◽  
...  
Keyword(s):  
Analytical Modeling ◽  
Ultrasonic Transducer ◽  
Governing Equations ◽  
Von Karman ◽  
Von Kármán Equations ◽  
Collapse Mode ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Gap Height ◽  
Von Kármán ◽  
Analytical Expressions

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

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