A New Approach to Form Accuracy Control in Machining

1985 ◽  
pp. 416-424
Author(s):  
Kornel F. Eman
Keyword(s):  
Accuracy Control ◽  
New Approach ◽  
Form Accuracy

scholarly journals In-Process Measurement and Workpiece-Referred Form Accuracy Control (6th Report)

1998 ◽  
Vol 64 (12) ◽  
pp. 1806-1810 ◽  
Author(s):  
Takanori YAZAWA ◽  
Tsuguo KOHNO ◽  
Yutaka UDA ◽  
Naohiro OHNO
Keyword(s):  
Accuracy Control ◽  
Form Accuracy ◽  
Process Measurement

An Ultraprecision On-Machine Measurement System

2005 ◽  
Vol 295-296 ◽  
pp. 375-380 ◽  
Author(s):  
Hitoshi Ohmori ◽  
Y. Watanabe ◽  
Wei Min Lin ◽  
Kazutoshi Katahira ◽  
T. Suzuki
Keyword(s):  
Measurement System ◽  
High Efficiency ◽  
Complex Form ◽  
Profile Measurement ◽  
Accuracy Control ◽  
Optical Components ◽  
Form Accuracy ◽  
Measurement Systems ◽  
Maximum Resolution ◽  
Measurement And Evaluation

Ultraprecision optical components require ultra-fine smooth surface quality of sub-nanometer or sub-angstrom in Ra. To satisfy these requirements, ultraprecision on-machine measurement system is very important, by which the profile measurement and evaluation is conducted on the machine. The form accuracy is improved by compensating machining when the form accuracy is not enough. Ultraprecision on-machine measurement systems were developed for measurement with high-accuracy and high-efficiency. It was confirmed that the on-machine measurement with AFM was possible for surface roughness or complex form for local areas. In addition, a laser probe unit with a maximum resolution of 1nm, a measuring range of 10mm, a repeatability of 5.6nm and a maximum measurable angle of 60 degrees was developed. The possibility of the non-contact on-machine form measurement was confirmed for global form accuracy control.

scholarly journals In-process Measurement and Workpiece-Referred Form Accuracy Control (7th Report)

1998 ◽  
Vol 64 (11) ◽  
pp. 1689-1693 ◽  
Author(s):  
Takanori YAZAWA ◽  
Toshifumi YAMAZAKI ◽  
Tsuguo KOHNO
Keyword(s):  
Accuracy Control ◽  
Form Accuracy ◽  
Process Measurement
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