In-Process Measurement of Subwavelength Structures

Precision Manufacturing - Metrology ◽

10.1007/978-981-10-4938-5_15 ◽

2019 ◽

pp. 435-475

Author(s):

Satoru Takahashi

Keyword(s):

Subwavelength Structures ◽

Process Measurement

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In-Process Measurement of Subwavelength Structures

Precision Manufacturing - Metrology ◽

10.1007/978-981-10-4912-5_15-1 ◽

2019 ◽

pp. 1-41

Author(s):

Satoru Takahashi

Keyword(s):

Subwavelength Structures ◽

Process Measurement

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Enhanced IEC 61499 system model for evolution of control applications in distributed Industrial-Process Measurement and Control Systems

2007 European Control Conference (ECC) ◽

10.23919/ecc.2007.7068501 ◽

2007 ◽

Author(s):

Thomas Strasser ◽

Christoph Sunder ◽

Martijn N. Rooker ◽

Oliver Hummer ◽

Alois Zoitl ◽

...

Keyword(s):

Control Systems ◽

Industrial Process ◽

System Model ◽

Control Applications ◽

Process Measurement ◽

And Control ◽

Measurement And Control ◽

Iec 61499

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Symbolic representation for process measurement control functions and instrumentation

10.3403/00099818u ◽

2015 ◽

Keyword(s):

Symbolic Representation ◽

Process Measurement ◽

Control Functions ◽

Measurement Control

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Symbolic representation for process measurement control functions and instrumentation

10.3403/00099818 ◽

1984 ◽

Keyword(s):

Symbolic Representation ◽

Process Measurement ◽

Control Functions ◽

Measurement Control

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Symbolic representation for process measurement control functions and instrumentation

10.3403/00099806u ◽

2015 ◽

Keyword(s):

Symbolic Representation ◽

Process Measurement ◽

Control Functions ◽

Measurement Control

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Operating conditions for industrial-process measurement and control equipment.

10.3403/00123091u ◽

2015 ◽

Keyword(s):

Industrial Process ◽

Operating Conditions ◽

Process Measurement ◽

Control Equipment ◽

And Control ◽

Measurement And Control

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Industrial-process measurement and control. Evaluation of system properties for the purpose of system assessment.

10.3403/00308526u ◽

2015 ◽

Keyword(s):

Industrial Process ◽

Process Measurement ◽

System Assessment ◽

Control Evaluation ◽

System Properties ◽

And Control ◽

Measurement And Control

Download Full-text

Industrial-process measurement and control. Evaluation of system properties for the purpose of system assessment

10.3403/00585896u ◽

2015 ◽

Keyword(s):

Industrial Process ◽

Process Measurement ◽

System Assessment ◽

Control Evaluation ◽

System Properties ◽

And Control ◽

Measurement And Control

Download Full-text

Industrial-process measurement and control. Evaluation of system properties for the purpose of system assessment

10.3403/00924777u ◽

2015 ◽

Keyword(s):

Industrial Process ◽

Process Measurement ◽

System Assessment ◽

Control Evaluation ◽

System Properties ◽

And Control ◽

Measurement And Control

Download Full-text

Industrial-process measurement and control. Evaluation of system properties for the purpose of system assessment

10.3403/00924777 ◽

1997 ◽

Keyword(s):

Industrial Process ◽

Process Measurement ◽

System Assessment ◽

Control Evaluation ◽

System Properties ◽

And Control ◽

Measurement And Control

Download Full-text