This report presents a complete package for bistable electromagnetic actuated microvalve. The function of the valve is to control the fuel delivery system in a fuel cell unit for power generation [1,2]. The microvalves were fabricated on top of a single wafer using 8 masking steps. The fabrication processes have a maximum processing temperature of 300 °C, providing potentially a CMOS compatible process. The valve arrays that compromise of 12 valves per 12 MM × 12 MM chip are built completely by surface micromachining. The chip is assembled into a package with fluidic connection parts. The parts were made from the stereo lithography (SLA) frame that was filled with PDMS. The PDMS also acts as a gasket to seal the microvalve from leaking. The fluidic tests show that the whole valve assembly can stand from leaks up to the pressure of 57.4 kPa.
FUEL DELIVERY SYSTEM HIJACKS IMMUNITY
