Focused ion beam milling for prototyping 2D and 3D photonic structures
2020 ◽
Vol 107
(11-12)
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pp. 4469-4480
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Keyword(s):
Ion Beam
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2008 ◽
Vol 18
(9)
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pp. 095010
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2009 ◽
Vol 267
(18)
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pp. 3072-3075
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2013 ◽
Vol 13
(8)
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pp. 5542-5546
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2009 ◽
Vol 233
(1)
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pp. 102-113
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2008 ◽
Vol 85
(3)
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pp. 640-645
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