Experimental investigation of redeposition during focused ion beam milling of high speed steel

2012 ◽  
Vol 36 (3) ◽  
pp. 408-413 ◽  
Author(s):  
Sanket N. Bhavsar ◽  
Sivanandam Aravindan ◽  
P. Venkateswara Rao
Keyword(s):  
Experimental Investigation ◽  
High Speed ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Speed Steel ◽  
Focused Ion Beam Milling

Experimental Investigation at Relatively High Speed Scratching Induced by a Developed Diamond Tip

2016 ◽  
Vol 1136 ◽  
pp. 277-281
Author(s):  
Zhen Yu Zhang ◽  
Bo Ya Yuan ◽  
Si Ling Huang ◽  
Zhi Feng Shi
Keyword(s):  
Experimental Investigation ◽  
High Speed ◽  
Focused Ion Beam ◽  
Crack Formation ◽  
Ion Beam ◽  
Depth Of Cut ◽  
Precision Grinding ◽  
Normal Forces ◽  
193 Nm ◽  
Si Wafer

A diamond tip with included angle of 90° and fillet radius of 45 nm is developed combining precision grinding and focused ion beam. Relatively high speed scratching at 8.4 m/s induced by the developed diamond tip is conducted on silicon (Si) (111) plane using an ultraprecision grinder. Width at the onset of chip formation on a Si wafer is 193 nm. Width and depth at the onset of crack formation are 1125 and 94 nm, respectively. Calculated normal forces at the onset of chip and crack formations are 424 μN and 14 mN, respectively, corresponding to the depth of cut is 44 and 466 nm.

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2012 ◽  
Vol 132 (1) ◽  
pp. 99-106
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Bin Tian ◽  
Lianying Zou ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

A study of angular effects in focused ion beam milling of water ice

2008 ◽  
Vol 18 (9) ◽  
pp. 095010 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B Joshi ◽  
Jeffrey M Catchmark
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Ice ◽  
Focused Ion Beam Milling

High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays

2003 ◽  
Vol 82 (8) ◽  
pp. 1281-1283 ◽  
Author(s):  
N. W. Liu ◽  
A. Datta ◽  
C. Y. Liu ◽  
Y. L. Wang
Keyword(s):  
High Speed ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Anodic Alumina ◽  
Ion Beam Patterning ◽  
Nanochannel Arrays

Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2013 ◽  
Vol 13 (8) ◽  
pp. 5542-5546 ◽  
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Lianying Zou ◽  
Bin Tian ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Quantitative off-axis electron holography of GaAsp-njunctions prepared by focused ion beam milling

2009 ◽  
Vol 233 (1) ◽  
pp. 102-113 ◽  
Author(s):  
D. COOPER ◽  
R. TRUCHE ◽  
A.C. TWITCHETT-HARRISON ◽  
R.E. DUNIN-BORKOWSKI ◽  
P.A. MIDGLEY
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Electron Holography ◽  
Focused Ion Beam Milling

Study and formation of 2D microstructures of sapphire by focused ion beam milling

2008 ◽  
Vol 85 (3) ◽  
pp. 640-645 ◽  
Author(s):  
Tao Dai ◽  
Xiangning Kang ◽  
Bei Zhang ◽  
Jun Xu ◽  
Kui Bao ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling
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