Characterization of interface defects in BiFeO3 metal–oxide–semiconductor capacitors deposited by radio frequency magnetron sputtering

2015 ◽  
Vol 26 (8) ◽  
pp. 5987-5993 ◽  
Author(s):  
Senol Kaya ◽  
Ercan Yilmaz ◽  
Aliekber Aktag ◽  
Jan Seidel
Keyword(s):  
Magnetron Sputtering ◽  
Metal Oxide ◽  
Radio Frequency ◽  
Metal Oxide Semiconductor ◽  
Radio Frequency Magnetron ◽  
Oxide Semiconductor ◽  
Radio Frequency Magnetron Sputtering ◽  
Interface Defects

Fabrication and characterization of superhard tungsten boride layers deposited by radio frequency magnetron sputtering

2016 ◽  
Vol 42 (10) ◽  
pp. 12221-12230 ◽  
Author(s):  
Justyna Chrzanowska ◽  
Łukasz Kurpaska ◽  
Maciej Giżyński ◽  
Jacek Hoffman ◽  
Zygmunt Szymański ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Tungsten Boride ◽  
Fabrication And Characterization

scholarly journals Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering

2003 ◽  
Vol 93 (7) ◽  
pp. 4091-4096 ◽  
Author(s):  
Isaku Kanno ◽  
Hidetoshi Kotera ◽  
Kiyotaka Wasa ◽  
Toshiyuki Matsunaga ◽  
Takeshi Kamada ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Characterization of Ferroelectric SrBi2Ta2 O 9 Thin Films Deposited by a Radio Frequency Magnetron Sputtering Technique

1997 ◽  
Vol 144 (8) ◽  
pp. 2855-2858 ◽  
Author(s):  
Sang‐Shik Park ◽  
Cheol‐Hoon Yang ◽  
Soon‐Gil Yoon ◽  
Jun‐Hyung Ahn ◽  
Ho‐Gi Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering
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