Chemical sputtering yields of silicon resulting from F+, CFn+ (n=1,2,3) ion bombardment

Vacuum ◽  
1983 ◽  
Vol 33 (6) ◽  
pp. 348
Keyword(s):  
Ion Bombardment ◽  
Chemical Sputtering ◽  
Sputtering Yields

Chemical sputtering yields of silicon resulting from F+, CFn+ (n= 1,2,3) ion bombardment

1982 ◽  
Vol 53 (4) ◽  
pp. 3214-3219 ◽  
Author(s):  
Kiyoshi Miyake ◽  
Shin’ichi Tachi ◽  
Kunihiro Yagi ◽  
Takashi Tokuyama
Keyword(s):  
Ion Bombardment ◽  
Chemical Sputtering ◽  
Sputtering Yields

Chemical sputtering yields of titanium carbides

1982 ◽  
Vol 111-112 ◽  
pp. 744-749 ◽  
Author(s):  
R. Yamada ◽  
K. Nakamura ◽  
M. Saidoh
Keyword(s):  
Chemical Sputtering ◽  
Titanium Carbides ◽  
Sputtering Yields

Total sputtering yields of solids under MeV-energy Si ion bombardment

2005 ◽  
Vol 230 (1-4) ◽  
pp. 483-488 ◽  
Author(s):  
Satoshi Ninomiya ◽  
Chikage Imada ◽  
Masafumi Nagai ◽  
Yoshihiko Nakata ◽  
Takaaki Aoki ◽  
...  
Keyword(s):  
Ion Bombardment ◽  
Sputtering Yields

Measurement of chemical sputtering yields of various types of carbon

1980 ◽  
Vol 95 (3) ◽  
pp. 278-284 ◽  
Author(s):  
R. Yamada ◽  
K. Nakamura ◽  
K. Sone ◽  
M. Saidoh
Keyword(s):  
Chemical Sputtering ◽  
Sputtering Yields

Sputtering Yields of CaO, SrO, and BaO by Monochromatic Noble Gas Ion Bombardment

2012 ◽  
Vol 51 ◽  
pp. 08HB02 ◽  
Author(s):  
Satoru Yoshimura ◽  
Kiyohiro Hine ◽  
Masato Kiuchi ◽  
Jun Hashimoto ◽  
Masaharu Terauchi ◽  
...  
Keyword(s):  
Noble Gas ◽  
Ion Bombardment ◽  
Sputtering Yields

Sputtering Yields for Low Energy He+‐, Kr+‐, and Xe+‐Ion Bombardment

1962 ◽  
Vol 33 (5) ◽  
pp. 1842-1845 ◽  
Author(s):  
D. Rosenberg ◽  
G. K. Wehner
Keyword(s):  
Ion Bombardment ◽  
Low Energy ◽  
Sputtering Yields
Sign in / Sign up

Export Citation Format

Share Document