Characterization of ZnO films prepared by dc reactive magnetron sputtering at different oxygen partial pressures

Vacuum ◽  
1995 ◽  
Vol 46 (8-10) ◽  
pp. 1001-1004 ◽  
Author(s):  
Li-Jian Meng ◽  
MP dos Santos
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Partial Pressures ◽  
Dc Reactive Magnetron Sputtering

Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

2011 ◽  
Vol 13 (2) ◽  
pp. 314-320 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
A. Sivasankar Reddy ◽  
Kee-Sun Lee ◽  
P. Sreedhara Reddy
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering

Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target

2019 ◽  
Vol 41 (2) ◽  
pp. 90-97 ◽  
Author(s):  
A. A. Onoprienko ◽  
V. I. Ivashchenko ◽  
A. O. Kozak ◽  
A. K. Sinelnichenko ◽  
T. V. Tomila
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering

Characterization of inhomogeneity in TiO2 thin films prepared by pulsed dc reactive magnetron sputtering

2011 ◽  
Vol 520 (1) ◽  
pp. 272-279 ◽  
Author(s):  
M. Horprathum ◽  
P. Eiamchai ◽  
P. Chindaudom ◽  
N. Nuntawong ◽  
V. Patthanasettakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tio2 Thin Films ◽  
Pulsed Dc ◽  
Dc Reactive Magnetron Sputtering

Preparation and characterization of transparent conductive ZnO:Ga films by DC reactive magnetron sputtering

2008 ◽  
Vol 59 (2) ◽  
pp. 124-128 ◽  
Author(s):  
Quan-Bao Ma ◽  
Zhi-Zhen Ye ◽  
Hai-Ping He ◽  
Jing-Rui Wang ◽  
Li-Ping Zhu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering
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