Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target
2019 ◽
Vol 41
(2)
◽
pp. 90-97
◽
2011 ◽
Vol 13
(2)
◽
pp. 314-320
◽
2006 ◽
Vol 17
(8)
◽
pp. 615-620
◽
2008 ◽
Vol 59
(2)
◽
pp. 124-128
◽
2020 ◽
Vol 31
(6)
◽
pp. 4563-4573
2011 ◽
Vol 29
(1)
◽
pp. 011018
◽