High level process control language “ESPRIT” and its source level debugging system “SOLDA”

1977 ◽  
Vol 8 ◽  
pp. 19-28
Author(s):  
Takashi Dasai ◽  
Kunio Iharada ◽  
Takeshi Sunohara ◽  
Toshiyuki Nakamura
Keyword(s):  
Process Control ◽  
Control Language ◽  
Source Level ◽  
High Level ◽  
Level Process ◽  
Level Process Control

High Level Process Control Language “ESPRIT” and its Source Level Debugging System “SOLDA”

1977 ◽  
Vol 10 (4) ◽  
pp. 19-28
Author(s):  
Takashi Dasai ◽  
Kunio Iharada ◽  
Takeshi Sunohara ◽  
Toshiyuki Nakamura
Keyword(s):  
Process Control ◽  
Control Language ◽  
Source Level ◽  
High Level ◽  
Level Process ◽  
Level Process Control

scholarly journals High-Level Process Control in Eden

2003 ◽  
pp. 732-741 ◽  
Author(s):  
Jost Berthold ◽  
Ulrike Klusik ◽  
Rita Loogen ◽  
Steffen Priebe ◽  
Nils Weskamp
Keyword(s):  
Process Control ◽  
High Level ◽  
Level Process ◽  
Level Process Control

Aids for driving lithography hard: wafer-level process control features

2001 ◽  
Author(s):  
Emily Fisch ◽  
Reginald R. Bowley, Jr. ◽  
James A. Bruce ◽  
Orest Bula
Keyword(s):  
Process Control ◽  
Wafer Level ◽  
Level Process ◽  
Level Process Control

Level Process Control with Different Tank Configurations: Hardware-in-the-Loop Technique

2021 ◽  
pp. 587-605
Author(s):  
Gissela F. Lozada ◽  
Jazmín K. Pruna ◽  
César A. Naranjo ◽  
Víctor H. Andaluz
Keyword(s):  
Process Control ◽  
Hardware In The Loop ◽  
Loop Technique ◽  
Level Process ◽  
Level Process Control
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