Detection of defects in micro-machine elements by using acoustic waves generated by phase velocity scanning of laser interference fringes

Author(s):  
H. Sato ◽  
S. Matsumoto ◽  
S. Nakano ◽  
H. Ogiso ◽  
H. Cho ◽  
...  
2000 ◽  
Vol 39 (Part 1, No. 5B) ◽  
pp. 3093-3096
Author(s):  
Harumichi Sato ◽  
Sohei Matsumoto ◽  
Hisato Ogiso ◽  
Hideo Cho ◽  
Kazushi Yamanaka

1994 ◽  
Vol 33 (Part 1, No. 5B) ◽  
pp. 3260-3264 ◽  
Author(s):  
Hideo Nishino ◽  
Yusuke Tsukahara ◽  
Yoshihiko Nagata ◽  
Toshio Koda ◽  
Kazushi Yamanaka

1995 ◽  
Vol 34 (Part 1, No. 5B) ◽  
pp. 2874-2878 ◽  
Author(s):  
Hideo Nishino ◽  
Yusuke Tsukahara ◽  
Hideo Cho ◽  
Yoshihiko Nagata ◽  
Toshio Koda ◽  
...  

1996 ◽  
Vol 35 (Part 1, No. 5B) ◽  
pp. 3066-3069 ◽  
Author(s):  
Harumichi Sato ◽  
Hideo Cho ◽  
Hideo Nishino ◽  
Hisato Ogiso ◽  
Kazushi Yamanaka

1996 ◽  
Vol 100 (4) ◽  
pp. 2622-2622
Author(s):  
Kazushi Yamanaka ◽  
Harumichi Sato ◽  
Hideo Cho ◽  
Mikio Takemoto ◽  
Hideo Nishino ◽  
...  

1996 ◽  
Vol 100 (4) ◽  
pp. 2622-2622
Author(s):  
Hideo Nishino ◽  
Noritaka Nakaso ◽  
Yusuke Tsukahara ◽  
Kazushi Yamanaka

2002 ◽  
Vol 41 (Part 1, No. 4A) ◽  
pp. 2256-2261
Author(s):  
Hideo Nishino ◽  
Yusuke Tsukahara ◽  
Mikio Takemoto ◽  
Kazushi Yamanaka

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