Detection of defects in micro-machine elements by using acoustic waves generated by phase velocity scanning of laser interference fringes

2001 ◽  
pp. 311-314
Author(s):  
H. Sato ◽  
S. Matsumoto ◽  
S. Nakano ◽  
H. Ogiso ◽  
H. Cho ◽  
...  
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Laser Interference ◽  
Interference Fringes ◽  
Machine Elements ◽  
Micro Machine ◽  
Detection Of Defects

Detection of Defects in Micro-Machine Elements by Using Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes

2000 ◽  
Vol 39 (Part 1, No. 5B) ◽  
pp. 3093-3096
Author(s):  
Harumichi Sato ◽  
Sohei Matsumoto ◽  
Hisato Ogiso ◽  
Hideo Cho ◽  
Kazushi Yamanaka
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Laser Interference ◽  
Interference Fringes ◽  
Machine Elements ◽  
Micro Machine ◽  
Detection Of Defects

Optical Probe Detection of High-Frequency Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes

1994 ◽  
Vol 33 (Part 1, No. 5B) ◽  
pp. 3260-3264 ◽  
Author(s):  
Hideo Nishino ◽  
Yusuke Tsukahara ◽  
Yoshihiko Nagata ◽  
Toshio Koda ◽  
Kazushi Yamanaka
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
High Frequency ◽  
Surface Acoustic Waves ◽  
Optical Probe ◽  
Laser Interference ◽  
Probe Detection ◽  
Interference Fringes

Generation and Directivity Control of Bulk Acoustic Waves by Phase Velocity Scanning of Laser Interference Fringes

1995 ◽  
Vol 34 (Part 1, No. 5B) ◽  
pp. 2874-2878 ◽  
Author(s):  
Hideo Nishino ◽  
Yusuke Tsukahara ◽  
Hideo Cho ◽  
Yoshihiko Nagata ◽  
Toshio Koda ◽  
...  
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Laser Interference ◽  
Bulk Acoustic Waves ◽  
Interference Fringes

Evaluation of Surface Defects Using Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes

1996 ◽  
Vol 35 (Part 1, No. 5B) ◽  
pp. 3066-3069 ◽  
Author(s):  
Harumichi Sato ◽  
Hideo Cho ◽  
Hideo Nishino ◽  
Hisato Ogiso ◽  
Kazushi Yamanaka
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Surface Defects ◽  
Surface Acoustic Waves ◽  
Laser Interference ◽  
Interference Fringes

Acoustic waves generated by phase velocity scanning of laser interference fringes

1996 ◽  
Vol 100 (4) ◽  
pp. 2622-2622
Author(s):  
Kazushi Yamanaka ◽  
Harumichi Sato ◽  
Hideo Cho ◽  
Mikio Takemoto ◽  
Hideo Nishino ◽  
...  
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Laser Interference ◽  
Interference Fringes

Generation of focused bulk acoustic waves by phase velocity scanning of laser interference fringes

1996 ◽  
Vol 100 (4) ◽  
pp. 2622-2622
Author(s):  
Hideo Nishino ◽  
Noritaka Nakaso ◽  
Yusuke Tsukahara ◽  
Kazushi Yamanaka
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Laser Interference ◽  
Bulk Acoustic Waves ◽  
Interference Fringes

Acoustic Fields of Bulk Acoustic Waves Excited by Phase Velocity Scanning of Laser Interference Fringes

2002 ◽  
Vol 41 (Part 1, No. 4A) ◽  
pp. 2256-2261
Author(s):  
Hideo Nishino ◽  
Yusuke Tsukahara ◽  
Mikio Takemoto ◽  
Kazushi Yamanaka
Keyword(s):  
Phase Velocity ◽  
Acoustic Waves ◽  
Acoustic Fields ◽  
Laser Interference ◽  
Bulk Acoustic Waves ◽  
Interference Fringes
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