Detection of defects in micro-machine elements by using acoustic waves generated by phase velocity scanning of laser interference fringes
2001 ◽
pp. 311-314
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2000 ◽
Vol 39
(Part 1, No. 5B)
◽
pp. 3093-3096
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1994 ◽
Vol 33
(Part 1, No. 5B)
◽
pp. 3260-3264
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Keyword(s):
1994 ◽
pp. 307-315
◽
Keyword(s):
Keyword(s):
1996 ◽
Vol 100
(4)
◽
pp. 2622-2622
Keyword(s):
1995 ◽
Vol 34
(Part 1, No. 5B)
◽
pp. 2874-2878
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Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 5B)
◽
pp. 3066-3069
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Keyword(s):
1996 ◽
Vol 100
(4)
◽
pp. 2622-2622
1996 ◽
Vol 100
(4)
◽
pp. 2622-2622
Keyword(s):
2002 ◽
Vol 41
(Part 1, No. 4A)
◽
pp. 2256-2261
Keyword(s):