Femtosecond laser surface structuring of silicon with Gaussian and optical vortex beams
2017 ◽
Vol 418
◽
pp. 565-571
◽
2014 ◽
Vol 228
(11)
◽
pp. 1325-1337
◽
2014 ◽
Vol 321
◽
pp. 560-565
◽
2015 ◽
Vol 353
◽
pp. 1334-1341
◽