Kinetic Monte Carlo study on the evolution of silicon surface roughness under hydrogen thermal treatment
2017 ◽
Vol 414
◽
pp. 361-364
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Keyword(s):
Keyword(s):
2001 ◽
Vol 138
(3)
◽
pp. 250-263
◽
Keyword(s):
2018 ◽
Vol 122
(47)
◽
pp. 27044-27058
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Keyword(s):
Keyword(s):