A new step forward in Transmission Electron Microscopy has been made with the introduction of the CompuStage on the CM-series TEMs: CM120, CM200, CM200 FEG and CM300. This new goniometer has motorization on five axes (X, Y, Z, α, β), all under full computer control by a dedicated microprocessor that is in communication with the main CM processor. Positions on all five axes are read out directly - not via a system counting motor revolutions - thereby providing a high degree of accuracy. The CompuStage enters the octagonal block around the specimen through a single port, allowing the specimen stage to float freely in the vacuum between the objective-lens pole pieces, thereby improving vibration stability and freeing up one access port. Improvements in the mechanical design ensure higher stability with regard to vibration and drift. During stage movement the holder O-ring no longer slides, providing higher drift stability and positioning accuracy as well as better vacuum.
Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage
