Process parameters optimization to maximize surface roughness using response surface methodology of TiC thin film grown by radio frequency magnetron sputtering

Author(s):  
Abegunde Olayinka ◽  
Akinlabi Esther ◽  
Oladijo Philip
2015 ◽  
Vol 42 (2) ◽  
pp. 0203006
Author(s):  
褚振涛 Chu Zhentao ◽  
于治水 Yu Zhishui ◽  
张培磊 Zhang Peilei ◽  
卢庆华 Lu Qinghua ◽  
李绍伟 Li Shaowei ◽  
...  

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