Direct fabrication of two-dimensional photonic crystal structures in silicon using positive and negative Hydrogen Silsesquioxane (HSQ) patterns

2012 ◽  
Vol 91 ◽  
pp. 70-74 ◽  
Author(s):  
Bashar Hamza ◽  
Anand Kadiyala ◽  
Lawrence A. Hornak ◽  
Yuxin Liu ◽  
Jeremy M. Dawson
2008 ◽  
Vol 33 (19) ◽  
pp. 2206 ◽  
Author(s):  
Uwe Bog ◽  
Cameron L. C. Smith ◽  
Michael W. Lee ◽  
Snjezana Tomljenovic-Hanic ◽  
Christian Grillet ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document