Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes

2017 ◽  
Vol 93 ◽  
pp. 187-193 ◽  
Author(s):  
Yi Zhou ◽  
Yan Tang ◽  
Qinyuan Deng ◽  
Junbo Liu ◽  
Jian Wang ◽  
...  
1998 ◽  
Vol 66 (11) ◽  
pp. 985-989 ◽  
Author(s):  
A. P. Kovács ◽  
K. Varjú ◽  
K. Osvay ◽  
Zsolt Bor

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