Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes
2017 ◽
Vol 93
◽
pp. 187-193
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2016 ◽
Vol 82
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pp. 41-47
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1997 ◽
Vol 44
(3)
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pp. 461-472
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1927 ◽
Vol 13
(4)
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pp. 216-221
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Keyword(s):
1945 ◽
Vol 36
(255)
◽
pp. 225-236
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Keyword(s):
1924 ◽
Vol 10
(11)
◽
pp. 452-457
◽
Keyword(s):
Keyword(s):