Al and Zn film deposition using a vacuum arc plasma source with a refractory anode

2010 ◽  
Vol 205 (7) ◽  
pp. 2369-2374 ◽  
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Y. Koulik ◽  
R.L. Boxman ◽  
D. Arbilly
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Vacuum Arc ◽  
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Thin Zr Film Deposition Using a Refractory Anode Vacuum Arc Plasma Source

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D. Arbilly ◽  
Y. Yankelevich ◽  
R. L. Boxman
Keyword(s):  
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Automatically reigniting dc vacuum arc plasma source

2002 ◽  
Vol 73 (8) ◽  
pp. 2971-2973 ◽  
Author(s):  
Liuhe Li ◽  
Tao Zhang ◽  
Paul K. Chu ◽  
Ian G. Brown
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High efficiency filtered vacuum-arc plasma source

2004 ◽  
Author(s):  
I.I. Aksenov ◽  
V.V. Vasilyev ◽  
A.A. Luchaninov ◽  
A.O. Omarov ◽  
V.E. Strel'nitskij ◽  
...  
Keyword(s):  
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Simple filtered repetitively pulsed vacuum arc plasma source

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Vol 81 (2) ◽  
pp. 023506 ◽  
Author(s):  
Yu. Chekh ◽  
I. S. Zhirkov ◽  
M. P. Delplancke-Ogletree
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scholarly journals Vacuum arc plasma generation and thin film deposition from a TiB2cathode

2015 ◽  
Vol 107 (18) ◽  
pp. 184103 ◽  
Author(s):  
Igor Zhirkov ◽  
Andrejs Petruhins ◽  
Lars-Ake Naslund ◽  
Szilard Kolozsvári ◽  
Peter Polcik ◽  
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Film Deposition ◽  
Vacuum Arc ◽  
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scholarly journals Optical emission spectra of a copper plasma produced by a metal vapour vacuum arc plasma source

2001 ◽  
Vol 34 (12) ◽  
pp. 1928-1932 ◽  
Author(s):  
B Yotsombat ◽  
S Davydov ◽  
P Poolcharuansin ◽  
T Vilaithong ◽  
I G Brown
Keyword(s):  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Source ◽  
Vacuum Arc ◽  
Arc Plasma ◽  
Metal Vapour ◽  
Optical Emission Spectra ◽  
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Properties of SnO2 films fabricated using a rectangular filtered vacuum arc plasma source

2008 ◽  
Vol 516 (15) ◽  
pp. 5079-5086 ◽  
Author(s):  
V.N. Zhitomirsky ◽  
E. Çetinörgü ◽  
R.L. Boxman ◽  
S. Goldsmith
Keyword(s):  
Plasma Source ◽  
Vacuum Arc ◽  
Arc Plasma
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