Thickness measurement of dielectric films by wavelength scanning method
2002 ◽
Vol 205
(1-3)
◽
pp. 1-6
◽
1999 ◽
Vol 194
(2-3)
◽
pp. 434-438
◽
2004 ◽
Vol 16
(5)
◽
pp. 1349-1351
◽
2007 ◽
Vol 39
(12-13)
◽
pp. 1081-1090
◽